Cantilever beam type flexoelectric acceleration sensor and method for measuring acceleration
An acceleration sensor, cantilever beam technology, applied in the sensor field, can solve the problems of small strain gradient, difficult to measure accurately, weak electrical signal, etc., to avoid the deformation of metal elastic elements, easy to measure accurately, and to select a wide range of effects.
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[0039] The present invention will be further described in detail below with reference to the drawings and specific embodiments.
[0040] Such as figure 1 As shown, a cantilever beam type flexural electrical acceleration sensor of the present invention includes a plurality of stacked flexural dielectric materials 6, and metal electrodes 8 are respectively provided on the upper and lower surfaces of the flexural dielectric material 6; The epoxy resin 7 of the adjacent metal electrode; the post 3 fixed at one end of the flexural dielectric material 6, a plurality of stacked flexural dielectric materials 6 and the metal electrodes 8 and epoxy resin 7 arranged on one end are fixed On the column 3, a cantilever beam is formed; the mass 9 is bonded to the other end of the flexural dielectric material 6, which is the free end of the cantilever beam; the lead 5 of the metal electrode is connected in series, and the two leads at both ends of the metal electrode 8 are connected to two The ...
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