Cantilever beam type flexoelectric acceleration sensor and method for measuring acceleration

Abstract

The invention discloses a cantilever beam type flexoelectric acceleration sensor and a method for measuring acceleration. The cantilever beam type flexoelectric acceleration sensor comprises a plurality of flexoelectric dielectric materials, metal electrodes, epoxy resin, an upright column, a mass block and two lead wires. The flexoelectric dielectric materials are stacked on one another, and themetal electrodes are arranged on the upper surfaces and the lower surfaces of the flexoelectric dielectric materials; every two adjacent metal electrodes are solidified by the epoxy resin; the uprightcolumn is fixed to one end of each flexoelectric dielectric material; the mass block is adhered at the other end of the corresponding flexoelectric dielectric material; the lead wires are arranged between the metal electrodes in a serially connected manner, and the other ends of the two lead wires are connected with two external metal electrodes; a packaging protection cover and a base are adhered with each other, and the flexoelectric dielectric materials, the metal electrodes, the mass block and the lead wires are sealed in the packaging protection cover and the base. The cantilever beam type flexoelectric acceleration sensor and the method have the advantages that the magnitude of the acceleration can be measured by the aid of linear relations between strain gradient of the flexoelectric dielectric materials under the effect of inertia force of the mass block along the thickness directions and electric charge generated on the basis of flexoelectric effects, and accordingly vibration can be measured.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a cantilever beam type flexoelectric acceleration sensor and an acceleration measurement method. Background technique [0002] The electromechanical coupling effect, which refers to the conversion of force to electricity or electricity to force, supports many materials as the foundation of functional materials. As the most common type of electromechanical coupling in dielectric materials, the piezoelectric effect plays an important role in the fields of modern biology, medicine, precision control and military affairs. Although piezoelectric materials have superior force-to-electricity conversion effects, there are still many limitations: firstly, the piezoelectric materials widely used in industry are lead-based alloys, which will cause great pollution to the environment; secondly, currently used more The preparation process of piezoelectric ceramic materials is complex and requ...

AI Technical Summary

Problems solved by technology

However, due to the small deformation of the metal elastic element after being pressed, the strain gradient of this kind of flexoelectric pressure sensor is also small, and the electrical signal generated is weak, so it is difficult to measure accurately

Secondly, the change in the material properties of the elastic element of the sensor directly affects the accuracy of the measurement

In addition, since the flexoelectric pressure sensor currently uses thin-film materials, it can only measure the micro-pressure received, and cannot measure the vibration

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