Cantilever beam type flexoelectric acceleration sensor and method for measuring acceleration
An acceleration sensor, cantilever beam technology, applied in the sensor field, can solve the problems of small strain gradient, difficult to measure accurately, weak electrical signal, etc., to avoid the deformation of metal elastic elements, easy to measure accurately, and to select a wide range of effects.
Inactive Publication Date: 2019-03-22
XI AN JIAOTONG UNIV
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Abstract
The invention discloses a cantilever beam type flexoelectric acceleration sensor and a method for measuring acceleration. The cantilever beam type flexoelectric acceleration sensor comprises a plurality of flexoelectric dielectric materials, metal electrodes, epoxy resin, an upright column, a mass block and two lead wires. The flexoelectric dielectric materials are stacked on one another, and themetal electrodes are arranged on the upper surfaces and the lower surfaces of the flexoelectric dielectric materials; every two adjacent metal electrodes are solidified by the epoxy resin; the uprightcolumn is fixed to one end of each flexoelectric dielectric material; the mass block is adhered at the other end of the corresponding flexoelectric dielectric material; the lead wires are arranged between the metal electrodes in a serially connected manner, and the other ends of the two lead wires are connected with two external metal electrodes; a packaging protection cover and a base are adhered with each other, and the flexoelectric dielectric materials, the metal electrodes, the mass block and the lead wires are sealed in the packaging protection cover and the base. The cantilever beam type flexoelectric acceleration sensor and the method have the advantages that the magnitude of the acceleration can be measured by the aid of linear relations between strain gradient of the flexoelectric dielectric materials under the effect of inertia force of the mass block along the thickness directions and electric charge generated on the basis of flexoelectric effects, and accordingly vibration can be measured.
Application Domain
Acceleration measurement using interia forces
Technology Topic
PhysicsInertia force +9
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PUM
Property | Measurement | Unit |
Thickness | 1.0 | mm |
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