Method for massively purifying trimethylaluminum crude product

A crude trimethylaluminum and trimethylaluminum technology, applied in the field of microelectronic materials, can solve the problems of uneven rectification column, difficult to amplify production, small working flow rate of microchannel rectification column, etc., and achieve optimized uniformity, The effect of broad practical value

Active Publication Date: 2019-04-05
江西石华精细化工科技协同创新有限公司
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Problems solved by technology

[0006] The invention provides a method for large-scale purification of crude trimethylaluminum, which solves the problems of small working flow rate of the micro-channel rectification tower, uneven rise of steam and uneven return of condensate to the micro-channel rectification column, and difficult production scale-up

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  • Method for massively purifying trimethylaluminum crude product
  • Method for massively purifying trimethylaluminum crude product
  • Method for massively purifying trimethylaluminum crude product

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Embodiment 1

[0027] A method for large-scale purification of trimethylaluminum crude product, comprising the following steps:

[0028] (1) The microchannel rectification tower is exchanged with inert gas, and the crude product of trimethylaluminum (the purity of trimethylaluminum is 99.93%) is transferred to the rectification kettle;

[0029] (2) After the materials have been transferred, close the feed valve and carry out rectification. Rectification pressure: 0.02MPa, rectification temperature: 80-128°C.

[0030] (3) intercept the distilled material with a boiling point of 125-127°C under standard atmospheric pressure, and collect it with a condenser to obtain a high-purity trimethylaluminum product;

[0031] like Figure 1~3 As shown, in the microchannel rectification tower 2, several microchannel rectification columns 3 are fixed into a rectification column bundle through a cluster device, and the microchannel rectification tower is provided with a heating jacket for heating and steam...

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Abstract

The invention discloses a method for massively purifying a trimethylaluminum crude product. The method comprises the following steps: through inert gas exchange of a microchannel rectifying tower, enabling the trimethylaluminum crude product to be transferred to a rectifying kettle; after transferring a material, closing a feeding valve, and rectifying, wherein a rectifying pressure is 0.02-0.1 MPa, and a rectifying temperature is 80-128 DEG C; collecting the distillated material of which a boiling point is 125-127 DEG C by using a condenser, to obtain a high-purity trimethylaluminum product.In the microchannel rectifying tower, a plurality of microchannel rectifying columns is fixed as a rectifying column beam through a beam concentrating device. A heating jacket is installed outside themicrochannel rectifying tower. A gas phase feeding port is connected below the microchannel rectifying tower, and a gas phase discharging port and a backflow liquid pipe are connected above the microchannel rectifying tower. The lower end of the backflow liquid pipe is connected with a gear-type flow distributor. The method is capable of, through improving a structure of the rectifying tower, guaranteeing an efficient distillation separation feature of a microchannel structure, and optimizing homogeneity of pipe body gas-liquid distribution, thereby realizing a large-scale efficient purification technology for trimethylaluminum in production.

Description

technical field [0001] The invention belongs to the technical field of microelectronic materials, in particular to a method for large-scale purification of crude trimethylaluminum. Background technique [0002] High-purity trimethylaluminum belongs to high-purity metal-organic compounds. It is a key supporting raw material for compound semiconductor thin film materials prepared by advanced metal-organic chemical vapor deposition (MOCVD) technology or atomic layer deposition thin film technology (ALD). It is widely used in LED equipment, new generation solar cells, phase change memory, semiconductor lasers, infrared detectors and supercomputers. The higher the purity of the raw material product, the better the performance and service life of the product. [0003] In the structure of the concentric tube distillation column, rectification is carried out by using a microchannel with a gap width of 500μm-5mm between the inner and outer tubes, which is called microchannel rectifi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D3/14B01D3/32C07F5/06
CPCB01D3/14B01D3/32
Inventor 廖维林许招会严楠郭晓红范乃立邱曾烨雷志伟
Owner 江西石华精细化工科技协同创新有限公司
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