Waste target processing and recovery method
A recycling method and target material technology, which is applied in the field of waste target material processing and recycling, can solve problems such as loss, improper recycling method, target material difficult to degrade, etc., and achieve the effects of large profits, improved precision, and improved processing recovery rate
Inactive Publication Date: 2019-04-05
罗源县中房镇人民政府
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Problems solved by technology
[0003] Improving the recycling of waste targets plays a very important role in the sustainable development strategy of the target manufacturing industry. The processing and recycling of waste targets can reduce resource and energy consumption and reduce environmental pressure. However, most recycling plants in the existing technology Improper recycling methods for waste targets, such as improper classification and extraction methods, will cause the recycled waste targets to not be fully utilized and cause unnecessary losses
Moreover, these waste targets themselves are difficult to degrade, and direct disposal will cause serious pollution to the environment
Method used
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Embodiment Construction
[0018] Such as figure 1 As shown, the embodiment of the present invention is a waste target processing and recycling method, including the following steps:
[0019] 1) Screen the recovered waste targets to remove impurities in the waste targets;
[0020] 2) Cut the screened waste target material by shearing machine, and clean and dry the cut waste target material segment;
[0021] 3) Crushing the dried waste target section through a crusher;
[0022] 4) Send the broken waste target material to the surface stripping machine through the belt conveyor for surface treatment to obtain the target material concentrate.
[0023] A preferred embodiment, such as figure 1 As shown, in step 2), the cut waste target segment is collected by dust removal equipment and then cleaned.
[0024] preferred, such as figure 1 As shown, in step 4), the crushed waste targets are firstly separated by a magnetic separator and then transported to the surface peeling machine by a belt conveyor, which...
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The invention provides a waste target processing and recovery method. The method comprises the following steps that (1) recovered waste targets are screened to remove impurities in the waste targets;(2) the screened waste targets are sheared by a shearing machine, and sheared waste target sections are cleaned and dried; (3) the dried waste target sections are crushed by a crushing machine; and (4) the crushed waste targets are conveyed by a belt conveyor into a surface peeling machine, surface treatment is carried out, and fine targets are obtained. By means of the method, recovered targets can be fully utilized, and the waste target processing and recycling rate is increased.
Description
technical field [0001] The invention relates to the field of target recycling, in particular to a method for processing and recycling waste targets. Background technique [0002] Magnetron sputtering is a common and most suitable coating method for industrial production. Its advantages are: the deposited film is uniform and dense, less pinholes, high purity, strong film adhesion, fast deposition speed, high film formation rate, and the substrate The temperature rise is low, the damage to the film layer is small, and large-area coating can be realized. At present, long or square zinc aluminum oxide ceramic targets (referred to as AZO ceramic targets, specifically AZO ceramic planar targets) are commonly used for magnetron sputtering coating. In the process of magnetron sputtering of AZO ceramic planar targets, AZO ceramic The utilization rate of targets is generally low (generally no more than 30%), and the vast majority (accounting for 70~80%) of AZO ceramic targets become ...
Claims
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IPC IPC(8): B09B3/00B09B5/00
CPCB09B3/00B09B5/00
Inventor 卓本育
Owner 罗源县中房镇人民政府