A three-dimensional angle measurement device and method based on polarization splitting self-collimation

Abstract

The invention belongs to the field of precision measurement technology and optical engineering, and specifically relates to a three-dimensional angle measurement device and method based on polarization splitting self-collimation; the device consists of a light source, a polarizer, a beam splitter, a polarization beam splitter, an image sensor, a collimation mirror, a fixed plane mirror and a cooperative target; in this method, the measuring beam is divided into two mutually perpendicular measuring beams through the cooperative target, which are respectively reflected by the fixed plane mirror and the cooperative target and returned to form respective beams on the image sensor. Image, using the two image positions to solve the pitch angle, yaw angle and roll angle of the cooperative target relative to the optical axis, so as to have the ability to detect the three-dimensional rotation angle of the measured object space; because the present invention uses an optical lever for the roll angle The magnification principle is consistent with the measurement principle of pitch angle and yaw angle, so it has the technical advantage of high precision and large working distance for three-dimensional angle measurement, and then has the ability to increase measurement accuracy at the same working distance, or increase work at the same measurement accuracy The advantage of distance; two channels of measurement light spots are received by two channels of image sensors, which reduces the requirements for subsequent image processing technology and improves the frequency response of the measurement device. In addition, the cooperative target designed in the present invention has the technical advantages of simple structure and low production cost.

Description

technical field [0001] The invention belongs to the technical field of precision measurement, and in particular relates to a three-dimensional angle measurement device and method based on polarization splitting self-collimation. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments, and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision self-collimation three-dimensional angle measurement technology at large working distances. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of autocollimator and circular grating can measure any line angle; the combination of autocollimation technology and polyhedral prism can measure surface angle and circular division; the maximum working distance is from several meters Up to hund...

AI Technical Summary

Problems solved by technology

[0012] Aiming at the problem that the traditional self-collimation angle measurement device cannot measure the rotation angle of the measured object around the optical axis, the present invention discloses a three-dimensional self-collimation angle measurement device and method based on polarization splitting, which is the same as the traditional self-collimation measurement Compared with other self-collimating three-dimensional angle measuring devices, it has the technical advantage of simultaneously measuring three-dimensional angles around three-axis rotation angles in the measured object space under the same measurement accuracy and working distance; Under the condition of measuring the three-dimensional angle of the rotation angle around the three axes in the measured object space at the same time, it has the technical advantages of high precision, high frequency response and large working distance in the roll angle measurement around the optical axis direction.

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