A three-dimensional angle measurement device and method based on dual-wavelength spectroscopic self-collimation
An angle measurement device and self-collimation technology, applied in the field of precision measurement, can solve problems such as high frequency response, inability to measure the rotation angle of the measured object, and large working distance
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specific Embodiment 1
[0041] This embodiment is based on the embodiment of a dual-wavelength spectroscopic self-collimation three-dimensional angle measurement device.
[0042] The structure diagram of the three-dimensional angle measurement device based on dual-wavelength spectroscopic self-collimation in this embodiment is as follows figure 2 shown. The angle measurement device includes a light source 1, a beam splitter 2, a transmissive collimator 4, a cooperative target 5 (including a beam splitter 52, a red light filter 53, and a plane mirror 51), a fixed plane mirror 6, a green light A filter 8, an RGB color image sensor 10.
[0043] The light beam emitted by the light source 1 is collimated into a parallel beam by the transmissive collimator 4, and is incident on the beam splitter 52 in the cooperation target 5, and is divided into two beams of measurement light; The light filter 53 becomes red light, which is incident on the plane reflector 51 in the cooperative target 5, and the reflect...
specific Embodiment 2
[0065] This embodiment is based on the embodiment of a dual-wavelength spectroscopic self-collimation three-dimensional angle measurement device.
[0066] The structure diagram of the three-dimensional angle measurement device based on dual-wavelength spectroscopic self-collimation in this embodiment is as follows Figure 4 shown. On the basis of the specific embodiment one, the cooperative target 5 of the present embodiment only includes a beam splitter 52 and a red filter 53; On the surface.
[0067] The embodiment of the three-dimensional angle measurement method based on dual-wavelength spectroscopic self-collimation in this embodiment includes the following steps:
[0068] Step a, fixing the combined target 5 to the surface of the measured object 7, placing the fixed plane mirror 6 and the green filter 8 so that the mirror surface is parallel to the exit surface of the beam splitter 52;
[0069] Step b, turn on the light source 1, adjust the position of the measured ob...
specific Embodiment 3
[0075] This embodiment is based on the embodiment of a dual-wavelength spectroscopic self-collimation three-dimensional angle measurement device.
[0076] The structure diagram of the three-dimensional angle measurement device based on dual-wavelength spectroscopic self-collimation in this embodiment is as follows Figure 5 shown. On the basis of the specific embodiment one, the dual-wavelength spectroscopic self-collimation three-dimensional angle measurement device of the present embodiment replaces the spectroscopic mirror 52 and the red light filter 53 in the cooperative target 5 with a dichroic mirror 54, and removes the fixed The green light filter 8 before the reflector 6 changes the light source 1 into a red light source 11 and a green light source 12, and adds a beam splitter 14 between the beam splitter 2 and the red light source 11 and the green light source 12;
[0077] The embodiment of the three-dimensional angle measurement method based on dual-wavelength spect...
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