Special clamp for valve element coating
A special fixture and spool technology, applied in the field of tooling and fixtures, can solve problems such as difficult clamping, and achieve the effect of convenient operation and simple structure
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[0026] The present invention will be further described below in conjunction with the accompanying drawings, but the present invention is not limited to the following examples.
[0027] Unbalanced magnetron sputtering ion plating equipment is currently a popular coating equipment; its working principle is based on unbalanced magnetron sputtering, that is, the magnetic field of a certain magnetic pole is strengthened or weakened by the magnetic field of the opposite magnetic pole of another polarity, resulting in The "non-equilibrium" of the magnetic field distribution is ensured; while ensuring that the horizontal magnetic field component on the target surface effectively constrains the movement of secondary electrons and maintains a stable magnetron sputtering discharge, another part of the electrons generates a longitudinal magnetic field perpendicular to the target surface along the strong magnetic poles. The electrons that escape from the target surface fly to the coating ar...
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