Unlock instant, AI-driven research and patent intelligence for your innovation.

Thin-film battery preparation device and method

A technology for thin-film batteries and preparation devices, which is applied in vacuum evaporation plating, coating, sputtering plating, etc., can solve the problems of low battery purity, interruption of production process, long production cycle, etc., so as to improve the purity and reduce the variety , the effect of shortening the production cycle

Active Publication Date: 2021-04-13
北京术自能科技有限公司
View PDF11 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a thin-film battery preparation device to solve the technical problems in the prior art that the production process is interrupted, the production cycle is long, and the battery purity is low due to the replacement of the target.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Thin-film battery preparation device and method
  • Thin-film battery preparation device and method
  • Thin-film battery preparation device and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0053] see figure 1 , as a specific embodiment of the thin film battery preparation device provided by the present invention, the sputtering vacuum chamber 11a and the number of evaporation vacuum chambers 12a are all one; there are five sputtering targets 010 in the sputtering vacuum chamber 11a, five A sputtering target 010 is respectively used to deposit the first protection layer 023, the cathode current collector layer 024, the cathode layer 025, the electrolyte layer 026 and the second protection layer 029; there are two evaporation targets 010 in the evaporation vacuum chamber 12a, The evaporation target 010 is used to deposit the cathode layer 025 and the cathode current collector layer 024 respectively. When the materials of the first protective layer 023 and the second protective layer 029 are the same, only four sputtering targets 010 can be set in the sputtering vacuum chamber 11a. The same sputtering target 010. Specifically, after the first protective layer 023...

Embodiment 2

[0055] see figure 2, as a specific embodiment of the thin-film battery preparation device provided by the present invention, the number of sputtering vacuum chambers is five, and the five sputtering vacuum chambers are respectively the first sputtering vacuum chambers for depositing the first protective layer 023 111. The second sputtering vacuum chamber 112 for depositing the cathode current collecting layer 024, the third sputtering vacuum chamber 113 for depositing the cathode layer 025, the fourth sputtering vacuum chamber 114 for depositing the electrolyte layer 026, and In the fifth sputtering vacuum chamber 115 for depositing the second protective layer 029, the number of evaporation vacuum chambers is two, and the two evaporation vacuum chambers are respectively the first evaporation vacuum chamber 121 for depositing the anode layer 027, The second evaporation vacuum chamber 122 for depositing the anode current collecting layer 028; the first sputtering vacuum chamber...

Embodiment 3

[0057] see image 3 , as a specific embodiment of the thin-film battery preparation device provided by the present invention, the number of sputtering vacuum chambers is five, and the five sputtering vacuum chambers are respectively the first sputtering vacuum chambers for depositing the first protective layer 023 111. The second sputtering vacuum chamber 112 for depositing the cathode current collecting layer 024, the third sputtering vacuum chamber 113 for depositing the cathode layer 025, the fourth sputtering vacuum chamber 114 for depositing the electrolyte layer 026, and In the fifth sputtering vacuum chamber 115 for depositing the second protective layer 029, the number of the evaporation vacuum chamber 12a is one, and the evaporation vacuum chamber 12a is used for depositing the anode layer 027 and the anode current collector layer 028; The chamber 111, the second sputtering vacuum chamber 112, the third sputtering vacuum chamber 113, the fourth sputtering vacuum chamb...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
Login to View More

Abstract

The invention provides a thin film battery preparation device and method, the device includes a thin film deposition vacuum chamber for depositing a thin film on the substrate of the battery, the number of thin film deposition vacuum chambers is at least two; the vacuum connection chamber connects adjacent Two film deposition vacuum chambers; a vacuum valve, located between the film deposition vacuum chamber and the vacuum connection chamber, used to control the connection and closure of the film deposition vacuum chamber and the vacuum connection chamber; the transmission mechanism, located in the vacuum connection chamber, used For transferring the cell from one of the thin film deposition vacuum chambers to the adjacent thin film deposition vacuum chamber. In the thin-film battery preparation device provided by the present invention, a plurality of thin-film deposition vacuum chambers pass through vacuum valves and vacuum connection chambers, and the deposited substrate can be transferred to adjacent thin-film deposition vacuum chambers through a conveying mechanism for other depositions. Repeating can keep the battery production process going on continuously without changing the target material, shortening the battery production cycle.

Description

technical field [0001] The invention belongs to the technical field of battery preparation, and more specifically relates to a thin film battery preparation device and method. Background technique [0002] Thin-film batteries refer to batteries formed by depositing multiple layers of chemical substances on a substrate. In the specific process of preparing thin film batteries, a vacuum chamber is usually used to deposit various layers of thin films: the target material to be deposited is placed in the vacuum chamber, and after the deposition is completed, another target material is replaced to continue the deposition. In this preparation process, after each layer of film is deposited, the target needs to be replaced, resulting in interruption of the production process and a long production cycle. Moreover, the deposition of multiple targets in one vacuum chamber is likely to cause contamination of the vacuum chamber, and the purity of the deposited battery materials is low, ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/34C23C14/04C23C14/56C23C14/58
CPCC23C14/0036C23C14/042C23C14/24C23C14/34C23C14/568C23C14/5806
Inventor 李致朋区定容
Owner 北京术自能科技有限公司