MEMS scan mirror

A scanning mirror and mirror surface technology, applied in the field of MEMS scanning mirrors, can solve the problems of increasing circuit complexity, piezoelectric film breakdown, increasing film deposition difficulty, etc.

Active Publication Date: 2019-04-12
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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  • Abstract
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Problems solved by technology

However, a large driving voltage is easy to break down the piezoelectric film, and at the same time brings many additional effects, increasing the complexity o

Method used

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Embodiment Construction

[0022] Embodiments of the present invention will be described in detail below. It should be emphasized that the following description is only exemplary and not intended to limit the scope of the invention and its application.

[0023] refer to figure 1 and figure 2 , in one embodiment, a MEMS scanning mirror includes two piezoelectric ceramic blocks 10, two piezoelectric driving arms 2, two beams 3, two torsion beams 4 and a mirror surface 5, the two There is a distance between the piezoelectric ceramic blocks 10, the two piezoelectric driving arms 2 are respectively arranged on the two piezoelectric ceramic blocks 10, and the two beams 3 are connected in parallel to the two piezoelectric driving arms. Between the arms 2, the two torsion beams 4 and the mirror surface 5 are connected in series between the two beams 3, and the mirror surface 5 is connected between the two torsion beams 4; The voltages applied to the two piezoelectric driving arms 2 are opposite, so that the...

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Abstract

The invention discloses a MEMS scan mirror. The MEMS scan mirror comprises two piezoelectric ceramic blocks, two piezoelectric driving arms, two cross beams, two torsion beams and a reflecting mirrorsurface, wherein an interval distance is arranged between the two piezoelectric ceramic blocks, the two piezoelectric driving arms are separately arranged on the two piezoelectric ceramic blocks, thetwo cross beams are connected in parallel between the two piezoelectric driving arms, the two torsion beams and the reflecting mirror surface are connected in series between the two cross beams, and the reflecting mirror surface is connected between the two torsion beams; the voltage applied by the two piezoelectric driving arms are opposite, so that the two piezoelectric driving arms bend in opposite directions, and the reflect mirror surface is driven to deflect; and the voltages applied by the two piezoelectric ceramic blocks are opposite, so that the deformation of the two piezoelectric ceramic blocks in opposite directions in the direction perpendicular to the reflecting mirror surface drives the reflecting mirror surface to deflect and is superposed with a deflection angle of the reflecting mirror surface caused by the piezoelectric driving arms to amplify the deflection angle of the reflecting mirror surface. The scan mirror can realize the large deflection angle, and has smallvolume, high reliability and simple structure and manufacturing process.

Description

technical field [0001] The invention relates to the field of micro-opto-electromechanical devices, in particular to a MEMS scanning mirror. Background technique [0002] As the core component of optical scanning, optical scanning mirror plays an important role in projection display, optical imaging and other systems. Compared with traditional optical scanning mirrors, MEMS scanning mirrors not only have the low cost and easy mass production common to MEMS devices, but also have better optical and mechanical properties, especially in terms of dynamic response and power consumption. . [0003] The actuators in MEMS optical devices and systems must have the characteristics of small size, good driving performance, accurate work, low power consumption, high reliability, and easy manufacturing. [0004] At present, MEMS scanning mirrors have various drive methods such as electrostatic drive, electromagnetic drive, piezoelectric drive, and thermal drive. The response of the ther...

Claims

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Application Information

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IPC IPC(8): G02B26/08G02B26/10
CPCG02B26/0858G02B26/105
Inventor 董瑛李思萦王晓浩
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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