Bonding wax detergent for semiconductor chips

Abstract

The invention discloses a bonding wax detergent for semiconductor chips. The bonding wax detergent is prepared from the raw materials in percentage by mass: 5%-10% of a C8 hydrocarbon solvent or C9 hydrocarbon solvent, 50%-70% of a C10 hydrocarbon solvent or C11 hydrocarbon solvent or C12 hydrocarbon solvent, 5%-10% of a C13 hydrocarbon solvent or C14 hydrocarbon solvent, and 20%-30% of dipropylene glycol dimethyl ether. All the components are matched mutually to completely dissolve components of bonding wax and remove bonding wax and other dirt on the surfaces of the chips, subsequent chemical cleaning operation is omitted, the cleaning process is simple, efficiency is high, the smell is light, and the semiconductor chips and cleaning equipment cannot be corroded.

Description

technical field [0001] The invention belongs to the technical field of special cleaning agents, in particular to a cleaning agent for bonding wax for semiconductor chips. Background technique [0002] The main components of the bonding wax used in the semiconductor chip manufacturing process are paraffin wax and rosin derivatives, and cleaning agents are needed to remove the bonding wax and other dirt on the surface of the chip. At present, the imported wax removal cleaning agent can dissolve the paraffin component in the bonding wax, but the rosin derivatives need to be removed by subsequent chemicals, and the cleaning process is complicated and inefficient. Domestic wax-removing cleaners use solvent oils containing aromatic derivatives, because aromatic derivatives and rosin derivatives have a more similar structure, in addition to the dissolution of hydrocarbon solvents on paraffin, it can enhance the cleaning of rosin derivatives However, it still needs follow-up chemic...

AI Technical Summary

Problems solved by technology

At present, the imported wax removal cleaning agent can dissolve the paraffin wax in the bonding wax, but the rosin derivatives need to be removed by subsequent chemicals, the cleaning process is complicated and the efficiency is low

Domestic wax-removing cleaners use solvent oils containing aromatic derivatives, because aromatic derivatives and rosin derivatives have a more similar structure, in addition to the dissolution of hydrocarbon solvents on paraffin, it can enhance the cleaning of rosin derivatives However, it still needs follow-up chemical cleaning to achieve the purpose of thoroughly cleaning the dirt. There are also problems such as complex cleaning process and low efficiency.

In addition, aromatic derivatives have a pungent odor, which is harmful to human health, and the practical application is limited