Vertical continuous PE reinforced reel-to-reel graphene film growth equipment

Abstract

The invention discloses vertical continuous PE reinforced reel-to-reel graphene film growth equipment. The equipment comprises an equipment frame; the outer surface of the front end of the equipment frame is provided with a pressure gauge, a touch control screen and a radio frequency controller from top to bottom in sequence; and a quartz tube is installed on one side of the equipment frame; an unreeling bin is installed at the top of the quartz tube, the middle of the upper end of the unreeling bin is provided with a first gas inlet, the middle of the interior of the unreeling bin is providedwith an unreeling shaft, and the top of the unreeling bin is provided with a second gas inlet. The vertical continuous PE reinforced reel-to-reel graphene film growth equipment is subjected to linkage through the unreeling shaft and a reeling shaft, PE excites plasma to continuously and rapidly prepare large-area high-quality graphene, and accordingly, the production rate is greatly increased; itis ensured that copper foil is in the vertical tightening state through self weight, the contact area between gas and the copper foil is increased, graphene films can grow on the two surfaces of thecopper foil in a nuclear proliferation mode, reactant gas disturbance can be avoided, and the film forming quality and efficiency are effectively improved.

Description

technical field [0001] The invention belongs to the field of PE-enhanced roll-to-roll graphene film continuous growth equipment, in particular to a vertical continuous PE-enhanced roll-to-roll graphene film growth equipment. Background technique [0002] Graphene film growth equipment is a kind of equipment used to prepare graphene film. With the continuous development of science and technology, graphene film growth equipment has been improved in structure and function. However, the existing roll-to-roll continuous growth of graphite The olefin film mainly adopts horizontal roll-to-roll equipment. The substrate copper foil is horizontally connected to the unwinding shaft and the winding shaft. Under the support of the quartz carrier, the rolling force is used to ensure that the copper foil is in a horizontal tension state. The following disadvantages: (1) copper foil is easy to soften and adhere to the quartz support at high temperature, which affects the effective contact o...

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Problems solved by technology

[0002] Graphene film growth equipment is a kind of equipment used to prepare graphene film. With the continuous development of science and technology, graphene film growth equipment has been improved in structure and function. However, the existing roll-to-roll continuous growth of graphite The olefin film mainly adopts horizontal roll-to-roll equipment. The substrate copper foil is horizontally connected to the unwinding shaft and the winding shaft. Under the support of the quartz carrier, the rolling force is used to ensure that the copper foil is in a horizontal tension state. The following disadvantages: (1) copper foil is easy to soften and adhere to the quartz support at high temperature, which affects the effective contact of the reaction gas, and the copper foil can only grow graphene film by nucleation and diffusion on one side; 4 The carbon atoms after cracking enter the heating area, and the plasma excited by the radio frequency power supply floods the entire heating area, and the excessively strong plasma bombards the copper foil to produce serious defects and cavities; (3) the exhaust port is located at the bottom of the winding cabin, and the H 2 , Ar, carbon atoms and uncleaved CH 4 , will pass through the winding cabin after film formation and then be discharged from the confined space, so that the film deposited and grown in the heating furnace will be disturbed by the mixed gas

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