Vertical continuous PE reinforced reel-to-reel graphene film growth equipment

A graphene film, roll-to-roll technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problems affecting the effective contact of reactive gases, easy softening and adhesion of copper foil, film interference, etc. Improve the quality and efficiency of film formation, high utilization rate, and increase the effect of contact area

Pending Publication Date: 2019-04-26
ANHUI BEQ EQUIP TECH
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Problems solved by technology

[0002] Graphene film growth equipment is a kind of equipment used to prepare graphene film. With the continuous development of science and technology, graphene film growth equipment has been improved in structure and function. However, the existing roll-to-roll continuous growth of graphite The olefin film mainly adopts horizontal roll-to-roll equipment. The substrate copper foil is horizontally connected to the unwinding shaft and the winding shaft. Under the support of the quartz carrier, the rolling force is used to ensure that the copper foil is in a horizontal tension state. The following disadvantages: (1) copper foil is easy to soften and adhere to the quartz support at high temperature, which

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  • Vertical continuous PE reinforced reel-to-reel graphene film growth equipment

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Embodiment Construction

[0022] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0023] Such as figure 1 As shown, a vertical continuous PE enhanced roll-to-roll graphene film growth equipment includes an equipment frame 18, and the front end outer surface of the equipment frame 18 is sequentially installed with a pressure gauge 6, a touch control screen 5 and a radio frequency Controller 1, wherein the model adopted by radio frequency controller 1 is RF, a quartz tube 15 is installed on one side of the equipment frame 18, and an unwinding cabin 8 is installed...

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Abstract

The invention discloses vertical continuous PE reinforced reel-to-reel graphene film growth equipment. The equipment comprises an equipment frame; the outer surface of the front end of the equipment frame is provided with a pressure gauge, a touch control screen and a radio frequency controller from top to bottom in sequence; and a quartz tube is installed on one side of the equipment frame; an unreeling bin is installed at the top of the quartz tube, the middle of the upper end of the unreeling bin is provided with a first gas inlet, the middle of the interior of the unreeling bin is providedwith an unreeling shaft, and the top of the unreeling bin is provided with a second gas inlet. The vertical continuous PE reinforced reel-to-reel graphene film growth equipment is subjected to linkage through the unreeling shaft and a reeling shaft, PE excites plasma to continuously and rapidly prepare large-area high-quality graphene, and accordingly, the production rate is greatly increased; itis ensured that copper foil is in the vertical tightening state through self weight, the contact area between gas and the copper foil is increased, graphene films can grow on the two surfaces of thecopper foil in a nuclear proliferation mode, reactant gas disturbance can be avoided, and the film forming quality and efficiency are effectively improved.

Description

technical field [0001] The invention belongs to the field of PE-enhanced roll-to-roll graphene film continuous growth equipment, in particular to a vertical continuous PE-enhanced roll-to-roll graphene film growth equipment. Background technique [0002] Graphene film growth equipment is a kind of equipment used to prepare graphene film. With the continuous development of science and technology, graphene film growth equipment has been improved in structure and function. However, the existing roll-to-roll continuous growth of graphite The olefin film mainly adopts horizontal roll-to-roll equipment. The substrate copper foil is horizontally connected to the unwinding shaft and the winding shaft. Under the support of the quartz carrier, the rolling force is used to ensure that the copper foil is in a horizontal tension state. The following disadvantages: (1) copper foil is easy to soften and adhere to the quartz support at high temperature, which affects the effective contact o...

Claims

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Application Information

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IPC IPC(8): C23C16/26C23C16/505C23C16/54
CPCC23C16/26C23C16/505C23C16/545
Inventor 孔令杰李晓丽吴克松李明陶辉
Owner ANHUI BEQ EQUIP TECH
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