Method for improving control precision of monocrystalline silicon resistivity
A technology for controlling precision and resistivity, which is applied in the field of improving the control precision of monocrystalline silicon resistivity, which can solve problems such as large resistivity fluctuations, no resistivity control precision, and unstable product performance, so as to improve conversion efficiency and reduce resistance The effect of improving the defect rate and improving the qualified output
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Examples
Embodiment Construction
[0018] The present invention will be further described below in conjunction with specific examples.
[0019] An embodiment of the present invention relates to a method for improving the control accuracy of resistivity of single crystal silicon, which is used in the process of Czochralski single crystal. In the process of Czochralski single crystal, the resistivity of recycled materials is refined and classified, and the The alloy sheet is refined and classified, and the materials used in the Czochralski single crystal process are refined, so as to improve the resistivity accuracy of single crystal silicon and improve product quality.
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com