ESD protection device of SOI power switch
A technology of ESD protection and power switching, which is applied in the direction of semiconductor devices, electric solid state devices, electrical components, etc., and can solve problems affecting protection performance
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[0027] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.
[0028] An embodiment of the present invention provides an ESD protection device for an SOI power switch, such as figure 2 As shown, it includes: a P-type substrate (P_sub) 101; an N-type deep well (DNW) 102 on the P-type substrate 101; a first N well 103, a first P well 104, the second N well 105, the second P well 106, the third N well 107, the width range of the second N well 105 is 2-8 μm; the first P well 104 includes the firs...
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