Transient voltage suppressor and manufacturing method thereof

Abstract

The invention provides a transient voltage suppressor and a manufacturing method thereof. The manufacturing method comprises the steps of providing a substrate of a first conductive type; growing an epitaxial layer of the first conductive type on the lower surface of the substrate; forming a groove extending from the upper surface of the substrate to the substrate; forming a first injection regionof a second conductive type on the upper surface of the substrate and the inner surface of the groove, and forming a second injection region of the second conductive type on the lower surface of theepitaxial layer; forming a tungsten plug structure in the groove, and filling the groove with the tungsten plug structure; forming a first electrode on the upper surface of the first injection regionand the upper surface of the tungsten plug structure; and forming a second electrode in connection with the second injection region on the lower surface of the second injection region. The characteristics of ultra-large power, low capacitance and strong surge protection capability can be achieved, and meanwhile, the chip area is reduced.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a transient voltage suppressor and a manufacturing method thereof. Background technique [0002] TVS (Transient Voltage Suppressor, Transient Voltage Suppressor) device is a clamp overvoltage protection device, which can fix the surge voltage at a relatively low voltage level in a short period of time, so that the back-end circuit is protected from Overvoltage damage, which is mainly used in various interface circuits, such as mobile phones, tablets, TVs, and computer hosts, which have a large number of TVS protection devices. [0003] At present, with the continuous development of electronic products, TVS devices are often required to have greater surge voltage protection capabilities, especially on mobile phone motherboards, tablet computers, and other smart mobile terminal equipment. Traditional TVS devices are usually obtained by increasing the chip area. Large surge ...

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Problems solved by technology

[0003] At present, with the continuous development of electronic products, TVS devices are often required to have greater surge voltage protection capabilities, especially on mobile phone motherboards, tablet computers, and other smart mobile terminal equipment. Traditional TVS devices are usually obtained by increasing the chip area. Large surge voltage protection capability, but this deviates from the continuous development of terminal equipment towards miniaturization, and can no longer meet the application requirements. Therefore, it is urgent to develop a TVS device with high power characteristics and small device area

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