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Measuring mechanism and method for dielectric constant of dielectric substrate

A technology of dielectric substrate and permittivity, which is used in the measurement of electrical variables, measurement devices, and resistance/reactance/impedance measurement, etc. The effect of accurate measurement results

Active Publication Date: 2020-12-25
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This has led to the fact that the traditional method of extracting the relative permittivity of the dielectric substrate has been difficult to meet the requirements of high precision.

Method used

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  • Measuring mechanism and method for dielectric constant of dielectric substrate
  • Measuring mechanism and method for dielectric constant of dielectric substrate
  • Measuring mechanism and method for dielectric constant of dielectric substrate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] like figure 1 and figure 2 shown, at a thickness of h sub Three substrate-integrated waveguide resonators 2 are respectively arranged on the dielectric substrate 1 of =6.52um. The cavity sizes of the three substrate-integrated waveguide resonators 2 are all 340um×340um. Metallized blind holes 3 are provided in the middle of the body, which are the first square metallized blind hole 31, the second square metallized blind hole 32, and the first square metallized blind hole 33, so that the dielectric substrate 1 Sample 1, sample 2, and sample 3 are respectively formed on the above. For details, refer to Figure 3 ~ Figure 5 . In this embodiment, the three metallized blind holes 3 are all square structures with the same side length and different heights, and the height of the first square metallized blind hole 31 is h 1 =0um, side length is l 1 =8um; the height of the second square metallized blind hole 32 is h 2 =2.76um, side length is l 1 =8um; the height of the t...

Embodiment 2

[0056] like figure 1 and figure 2 shown, at a thickness of h sub Three substrate-integrated waveguide resonators 2 are respectively arranged on the dielectric substrate 1 of =6.52um. The cavity sizes of the three substrate-integrated waveguide resonators 2 are all 340um×340um. Metallized blind holes 3 are provided in the middle of the body. They are respectively the fourth square metallized blind hole 34, the fifth square metallized blind hole 35, and the sixth square metallized blind hole 36, so that sample 4, sample 5 and sample 6 are respectively formed on the dielectric substrate 1. For details, refer to Figure 6 ~ Figure 8 . In this embodiment, the three metallized blind holes 3 are all square structures with the same height and different side lengths, and the height of the fourth square metallized blind hole 34 is h 4 =5.52um, the side length is l 4 =0um; the height of the fifth square metallized blind hole 35 is h 4 =5.52um, the side length is l 5 =2um; the hei...

Embodiment 3

[0070] In this embodiment, the methods of Embodiment 1 and Embodiment 2 are compared with several traditional dielectric constant measurement methods respectively, and the specific data are shown in the following table:

[0071]

[0072] According to the above table, it can be seen that in the high-frequency band, the de-embedding method of the traditional dielectric constant measurement not only does not help the accuracy improvement but worsens the result. This is because in the millimeter-wave, submillimeter-wave and even terahertz frequency bands, the size of the feed structure is comparable to that of the resonator itself, and the influence of the feed structure on the structure of the resonator cannot be ignored. However, the dielectric constant measurement method shown in the present invention provided by Examples 1 and 2 shows the accuracy that other traditional methods in this frequency band do not have. At the same time, the method is easy to operate, simple in pro...

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Abstract

The present invention discloses a dielectric substrate dielectric constant measuring mechanism and a measuring method thereof. The mechanism comprises at least three substrate integrated waveguide resonant cavities disposed on a dielectric substrate, a metallized blind hole is arranged at the middle portion of the internal portion of a cavity of each substrate integrated waveguide resonant cavity,the sizes of all the metallized blind holes are different, the top layer of each substrate integrated waveguide resonant cavity is provided with a grounded coplanar waveguide and a GSG pad structurewhich form a feed structure of the substrate integrated waveguide resonant cavity, and the grounded coplanar waveguide is connected with the substrate integrated waveguide resonant cavities and the GSG pad structures. The influence of impedances of the feed structures and the feed structure themselves on the no-load resonant frequency of the resonant cavities are considered, a method for extracting the dielectric constant in a form of simultaneous equations is employed to remove the influences of external factors of the probe connected with a vector network analyzer and the transmission line structure, and therefore, the measurement result is more accurate, and the measurement precision is improved.

Description

technical field [0001] The invention belongs to the technical field of microwaves and millimeter waves, and in particular relates to a dielectric substrate dielectric constant measurement mechanism based on a substrate integrated waveguide resonator cavity and a measurement method thereof. Background technique [0002] At present, the dielectric constant measurement methods of dielectric substrates mainly include lumped circuit method, resonant cavity method, transmission line method and free space method, among which the resonant cavity method is the most commonly used and accurate one. Especially after the substrate-integrated waveguide was proposed, the substrate-integrated waveguide resonator solved the shortcomings of the traditional metal waveguide resonator, such as large volume and difficulty in integration, and has been widely used. However, the impedance of the feed structure of the substrate-integrated waveguide resonator has a large interference on the extraction...

Claims

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Application Information

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IPC IPC(8): G01R27/26
Inventor 孔商成叶凯胡三明
Owner SOUTHEAST UNIV
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