Container and device for cleaning silicon blocks and cleaning method
A silicon block and container technology, which is applied in the direction of using liquid cleaning methods, cleaning methods and utensils, chemical instruments and methods, etc., can solve the deviation of the cleaning effect of the silicon block, the reaction heat between the silicon block and the etching solution cannot be removed as soon as possible, Can not effectively clean the silicon block and other problems to achieve the effect of improving the cleaning effect
Active Publication Date: 2019-06-14
XIAN ESWIN MATERIAL TECH CO LTD +1
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Problems solved by technology
[0004] In view of this, the present invention provides a container for cleaning silicon blocks, by setting a cleaning area for placing silicon blocks in the accommodating chamber of the container body and a space for circulating liquid and releasing reaction heat outside the cleaning area. The blank area is used to solve the problem that the existing container cannot effectively clean the silicon block in the container, so that the cleaning effect of the silicon block in the same container is relatively large, and the reaction heat between the silicon block and the etching solution cannot be removed as soon as possible, which affects the cleaning of the silicon block Questions of efficiency and cleaning costs
Method used
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[0049] Take a basket for cleaning silicon blocks, set four blank areas of different widths in the same basket, and use a basket without blank areas as a comparison example. The specifications and weight of the silicon blocks in the embodiment of the present invention and the comparative example basket are the same , the width of the blank area, the percentage of the blank area to the volume of the basket, and the apparent proportion of the silicon block are shown in Table 1:
[0050] Table 1
[0051]
[0052] According to the conditions listed in Table 1, the silicon block is washed and rinsed by the liquid medicine supply component, the solvent in the washing tank and the rinse tank of the liquid medicine supply component is 60L, the number of rinse tanks is set to 3, and the circulation flow rate of the liquid medicine is 60L / min, the shaking frequency is 40Hz, the flushing flow rate is 25L / min, and the intermittent time is 4 minutes. After flushing, the volume detection...
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The invention provides a container and device for cleaning silicon blocks and a cleaning method. The container for cleaning the silicon blocks includes a container body, wherein a containing cavity isformed in the containing body and includes a cleaning zone used for placing the silicon blocks and a blank zone which is outside the cleaning zone and is used for circulating liquid and releasing reaction heat; and the containing body is provided with a first through hole communicating with the containing cavity and used for circulating the liquid. According to the container for cleaning the silicon blocks, the silicon blocks in the container can be effectively cleaned, the surfaces of the silicon blocks in a frame can be uniformly cleaned, the problems that the cleaning efficiency and cleaning cost of the silicon blocks are affected due to the fact that the reaction heat of the silicon blocks and an etchant cannot be removed quickly are solved, and the cleaning effect of the silicon blocks is improved.
Description
technical field [0001] The invention relates to the technical field of semiconductors, in particular to a container, device and cleaning method for cleaning silicon blocks. Background technique [0002] The washing of silicon blocks is an important process to improve the quality of semiconductor materials. In the prior art, during the etching and washing process of silicon blocks (single crystal and polycrystalline), the silicon blocks are placed in special containers for washing, such as in baskets , Dip the silicon block in an acid cleaning solution such as hydrofluoric acid, nitric acid, etc. and shake the basket to wash the silicon block. When analyzing the concentration of metal impurities and residual anions on the surface of the silicon block obtained by this method, the cleaning effect of different parts of the silicon block is different. In a basket, there are great deviations in the results. For example, after filling the silicon block in the basket , a better cle...
Claims
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Login to View More IPC IPC(8): B08B3/08B08B13/00C30B33/10C30B29/06
Inventor 宫尾秀一
Owner XIAN ESWIN MATERIAL TECH CO LTD