High-resolution terahertz wave concentrating module, scattered light detection module, and high-resolution inspection apparatus using terahertz bessel beam

A terahertz wave Bessel and Bessel beam technology, which is applied in the field of high-resolution terahertz wave concentrating modules, can solve the problem of weak terahertz wave signal, reduce the proportion of terahertz wave passing through the inspection object, and cannot be accurate Check the inspection object and other problems to achieve the effect of improving the resolution, improving the contrast, and improving the light-gathering efficiency

Active Publication Date: 2019-06-14
KOREA FOOD RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0019] In addition, the depth of focus of the Bessel beam cannot reach the end of the object to be inspected, so there is a problem that high-resolution images cannot be obtained
[0020] In addition, if the object to be inspected contains a large amount of water, since the terahertz wave is easily absorbed by water, the ratio of the terahertz wave to pass through the object to be inspected will be significantly reduced.
According to this, the signal of the terahertz wave detected by the terahertz wave detection unit is weak, so there is a problem that the object to be inspected cannot be accurately inspected.

Method used

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  • High-resolution terahertz wave concentrating module, scattered light detection module, and high-resolution inspection apparatus using terahertz bessel beam
  • High-resolution terahertz wave concentrating module, scattered light detection module, and high-resolution inspection apparatus using terahertz bessel beam
  • High-resolution terahertz wave concentrating module, scattered light detection module, and high-resolution inspection apparatus using terahertz bessel beam

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Embodiment Construction

[0101] Hereinafter, specific contents for implementing the invention will be described in detail with reference to the drawings.

[0102] figure 1 It is a diagram for explaining a high-resolution inspection device using a terahertz wave Bessel beam related to an embodiment of the present invention.

[0103] refer to figure 1, the high-resolution inspection device 100 using a Bessel beam includes a scanner 110, a terahertz wave optical head 120, an inspection target object 130, a terahertz wave focusing head 140, a first transport unit 150, and a second transport unit 160.

[0104] The scanner 110 can scan the shape of an inspection target object.

[0105] The terahertz wave optical head 120 generates terahertz waves, and can irradiate the inspection target object 130 with the generated terahertz waves.

[0106] The terahertz wave focusing head 140 can detect the terahertz wave transmitted through the inspection target object 130 .

[0107] The first transport unit 150 may...

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Abstract

According to one embodiment of the present invention, a terahertz wave concentrating module can comprise: a first lens for changing a terahertz wave, which is emitted while a terahertz Bessel beam penetrates an object to be inspected, so as to have a small angle; and a second lens for concentrating, on a detector, the terahertz wave having passed through the first lens.

Description

technical field [0001] The present invention is a technique for inspecting an object to be inspected by a non-destructive method using a terahertz wave, and relates to a high-resolution terahertz wave focusing module with a high resolution below a wavelength beyond the diffraction limit. [0002] In addition, the present invention relates to a scattered light detection module, which uses a Bessel beam to form an annular beam, and detects scattered light reflected or transmitted through the inspected object when the formed annular beam is used to inspect the inspected object, thereby improving contrast. [0003] In addition, the present invention relates to a high-resolution inspection device using a terahertz wave Bessel beam, which uses a scanner to grasp the shape of an object, and synchronizes an optical head and a light focusing head based on the grasped object shape. [0004] (Korean R&D project supporting this invention) [0005] (Problem specific number) ER160200-01 ...

Claims

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Application Information

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IPC IPC(8): G01N21/3581G01V8/10G01J3/42G02B5/00
CPCG02B27/0927G02B27/0955G01N21/47G02B3/00G02B2003/0093
Inventor 玉景植崔成旭张玄珠
Owner KOREA FOOD RES INST
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