High-resolution terahertz wave concentrating module, scattered light detection module, and high-resolution inspection apparatus using terahertz bessel beam
A terahertz wave Bessel and Bessel beam technology, which is applied in the field of high-resolution terahertz wave concentrating modules, can solve the problem of weak terahertz wave signal, reduce the proportion of terahertz wave passing through the inspection object, and cannot be accurate Check the inspection object and other problems to achieve the effect of improving the resolution, improving the contrast, and improving the light-gathering efficiency
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[0101] Hereinafter, specific contents for implementing the invention will be described in detail with reference to the drawings.
[0102] figure 1 It is a diagram for explaining a high-resolution inspection device using a terahertz wave Bessel beam related to an embodiment of the present invention.
[0103] refer to figure 1, the high-resolution inspection device 100 using a Bessel beam includes a scanner 110, a terahertz wave optical head 120, an inspection target object 130, a terahertz wave focusing head 140, a first transport unit 150, and a second transport unit 160.
[0104] The scanner 110 can scan the shape of an inspection target object.
[0105] The terahertz wave optical head 120 generates terahertz waves, and can irradiate the inspection target object 130 with the generated terahertz waves.
[0106] The terahertz wave focusing head 140 can detect the terahertz wave transmitted through the inspection target object 130 .
[0107] The first transport unit 150 may...
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