Micro-channel cross-section geometric dimension measurement method based on three-dimensional reconstruction model

Abstract

The invention discloses a micro-channel cross-section geometric dimension measurement method based on a three-dimensional reconstruction model, comprising the steps of: establishing an entity model ofa micro-channel, and extracting a skeleton of the micro-channel; determining a micro-channel segmentation plane; extracting the intersections of the micro-channel segmentation plane and the tetrahedral boundary surface of the micro-channel entity model; and measuring the cross-section geometric dimension of the micro-channel. The micro-channel cross-section geometric dimension measurement methodbased on the three-dimensional reconstruction model can measure the cross-section geometric dimensions of different positions of the micro-channel with a high depth-to-width ratio, replaces a measuring method difficult to operate by the method of segmenting the entity model tetrahedron, and is easy to operate, wide in application range and accurate in cross-section segmentation. The method does not damage any structure, and realizes nondestructive measurement of the cross-section geometric dimension of the micro-channel.

Description

technical field [0001] The invention relates to the technical field of geometric dimension measurement of a microfluidic chip, in particular to a method for measuring the geometric dimension of a microchannel cross section based on a three-dimensional reconstruction model. Background technique [0002] At present, microfluidic chips have become the development focus and cutting-edge technology of Micro Total Analysis System (μ-TAS) and Lab on a Chip (Lab on a Chip). However, there are still many problems to be solved urgently, one of which is the evaluation of the quality of microchannels in microfluidic chips. The microchannel is the basic structure of the microfluidic chip. The geometric size of the cross-section of the microchannel will affect the movement, flow pattern, and diffusion of the microfluid, which may affect the analysis results of the sample. Therefore, the cross-sectional geometry of the microchannel Size measurement is particularly important. [0003] The...

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Problems solved by technology

When a scanning electron microscope (SEM) works, it is necessary to ensure that the entire path of the electron beam is in a high vacuum state, and the sample must be electrically conductive. The entire working process is complicated and requires specialized personnel to operate

The needle point angle and needle point arc radius of the stylus profiler will affect the measurement accuracy, and sometimes there will be errors in the measurement results of irregular microchannel cross-sectional dimensions

Using a stylus profiler to measure microchannels, the stylus can usually reach the bottom of the microchannel completely, so the depth measurement is more accurate, but in the width direction, due to the difference in the depth of the microchannel and the inclination angle of the side wall, the stylus and the microchannel may occur Sidewall interference; also the profile measured by a stylus profiler does not always reflect the true microchannel cross-sectional geometry

Moreover, when measuring soft substrate microfluidic chips such as PDMS, different degrees of deformation will occur

White-light Interferometer measurement is non-contact, without damage to the measured surface, and has high measurement accuracy; however, the measurement system of this measuring instrument is complex and has high requirements for the optical properties of the measured surface, and transparent materials require Reflective treatment such as coating, currently rarely used in the field of microfluidic chips

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