A high-efficiency linear vacuum coating line for workpiece surface coating
A technology for vacuum coating and workpiece surface, applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of slow speed, decreased coating efficiency and quality, uneven airflow, etc.
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[0029]The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0030] see Figure 1-2 , the present invention provides a technical solution: a high-efficiency linear vacuum coating line for workpiece surface coating, including an unwinding chamber 1 and a cleaning machine that is sequentially fixed and serially connected to the rear side of the unwinding chamber 1 through bolts and gaskets. Chamber 2, vacuum coating chamber 3, cooling chamber 4 and winding chamber 5;
[0031] The inner bottom of the unwinding chamber 1 is...
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