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Evaluating quality of a product such as a semiconductor substrate

A technology for semiconductors and substrates, applied in the field of evaluating the quality of products such as semiconductor substrates, to achieve the effect of improving evaluation accuracy and improving evaluation accuracy

Pending Publication Date: 2019-07-02
ORMON CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, the decisions made by AI may not always be correct

Method used

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  • Evaluating quality of a product such as a semiconductor substrate
  • Evaluating quality of a product such as a semiconductor substrate
  • Evaluating quality of a product such as a semiconductor substrate

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Embodiment Construction

[0095] Hereinafter, a detailed description of the embodiments will be given with reference to the accompanying drawings. It should be understood that various modifications can be made to the embodiments. In particular, elements of one embodiment may be combined and applied to other embodiments to form new embodiments.

[0096] Hardware Configuration

[0097] figure 1 An exemplary hardware configuration of an evaluation system according to an exemplary embodiment is shown. exist figure 1 Among them, the system 1 includes: an evaluation device 10, a manufacturing device 40, a camera 50, and one or more sensors 60-1, . . . , 60-N.

[0098] The evaluation device 10 can be realized by a general-purpose computer. For example, if figure 1 As shown, evaluation device 10 may include: processor 12 , system memory 14 , hard disk drive (HDD) interface 16 , external disk drive interface 20 , and input / output (I / O) interface 24 . These components of evaluation device 10 are connect...

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Abstract

An evaluation device (10) may be provided for evaluating quality of a semiconductor substrate manufactured by a semiconductor substrate manufacturing apparatus (40). The evaluation device (10) may comprising: a receiving unit (100) configured to receive an image of the semiconductor substrate, the image being captured by an imaging device (50) provided on the semiconductor substrate manufacturingapparatus (40); a determination unit (102) configured to determine, using a neural network (1020), at least one value representative of a probability of a machine learning device (70) outputting an erroneous output for the image of the semiconductor substrate, the machine learning device (70) being configured to: (i) receive the image of the semiconductor substrate, (ii) perform computation usingthe received image, and (iii) output information indicating the quality of the semiconductor substrate based on a result of the computation; and an output unit (104) configured to output an output based on the at least one value representative of the probability, wherein the neural network (1020) has been trained using: images of manufactured semiconductor substrates; and information indicating, for each one of the images of the manufactured semiconductor substrates, a level of erroneousness for an output from the machine learning device (70) for said one of the images of the manufactured semiconductor substrates.

Description

[0001] The present application relates to evaluating the quality of products such as semiconductor substrates made by semiconductor substrate manufacturing equipment. Background technique [0002] Methods and / or systems have been developed that utilize Artificial Intelligence (AI) to assess the quality of manufactured products. For example, JP2008-164461A discloses a detection method of a thin-plate-shaped component, wherein images of two surfaces of the thin-shaped component are taken, an input value of a neural network is calculated from the image data using a two-dimensional fast Fourier transform, and The mass of the sheet-shaped component is determined by inputting the calculated input values ​​into a neural network. [0003] However, the decisions made by AI may not always be correct. In this regard, JP H05-225163A discloses a neural network system including a problem-solving neural network and an evaluation network. The evaluation network is trained to output an outpu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06K9/03G06K9/46G06K9/62G06V10/764
CPCG06V10/993G06V10/454G06V10/82G06V10/7788G06V10/764G01N21/9501G06N3/084G06T7/0004G06T2207/20081G06T2207/20084G06T2207/30148H01L21/67288G06N3/047
Inventor 安藤丹一菅原启
Owner ORMON CORP
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