A fingerprint identification sensor, its preparation method, and display device
A fingerprint recognition and sensor technology, which is applied in radiation control devices, character and pattern recognition, and acquisition/organization of fingerprints/palmprints. minor issues
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Embodiment 1
[0073] Figure 4 It shows a schematic cross-sectional view of a fingerprint identification sensor according to Embodiment 1 of the present invention, refer to Figure 4 The fingerprint recognition sensor may include a base substrate 10 , a thin film transistor 20 (Thin Film Transistor, TFT) and a photosensitive device 30 , and the thin film transistor 20 , the base substrate 10 and the photosensitive device 30 are stacked along the thickness direction of the base substrate 10 . Wherein, the base substrate 10 may include a conductive structure 11 penetrating through the base substrate 10 in the thickness direction of the base substrate 10 , and the photosensitive device 30 may be connected to the thin film transistor 20 through the conductive structure 11 of the base substrate 10 . Wherein, the thin film transistor 20 can be used to release the photogenerated charge generated by the photosensitive device 30 .
[0074] Regarding problem 1 arising from related technologies, in t...
Embodiment 2
[0091] refer to Figure 7 , which shows a flow chart of the steps of a method for manufacturing a fingerprint recognition sensor according to Embodiment 2 of the present invention, the method may include the following steps:
[0092] Step 701: Provide a base substrate; the base substrate includes a conductive structure penetrating through the base substrate in a thickness direction of the base substrate.
[0093] In the embodiment of the present invention, through holes can be formed on the base substrate 10 along the thickness direction of the base substrate 10 by means of laser drilling, etc., and then conductive materials, such as copper metal, can be electroformed in the through holes, Thereby, the conductive structure 11 penetrating the base substrate 10 in the thickness direction of the base substrate 10 can be obtained, that is, the base substrate 10 having the conductive structure 11 can be obtained, such as Figure 8 shown. Of course, it is also possible to directly...
Embodiment 3
[0134] The embodiment of the present invention also discloses a display device, including the above-mentioned fingerprint recognition sensor.
[0135] In the embodiment of the present invention, the fingerprint identification sensor in the display device may include a base substrate, a thin film transistor and a photosensitive device, and the thin film transistor, the base substrate and the photosensitive device are stacked along the thickness direction of the base substrate. Wherein, the base substrate includes a conductive structure penetrating through the base substrate in the thickness direction of the base substrate, and the photosensitive device can be connected to the thin film transistor through the conductive structure of the base substrate. In the embodiment of the present invention, the thin film transistor, the base substrate, and the photosensitive device are stacked along the thickness direction of the base substrate, that is, the thin film transistor and the phot...
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