Chlorosilane refining system and method

The technology of a refining system and refining method is applied to the chlorosilane refining system and refining field, which can solve the problems of difficult to effectively remove impurities, poor refining effect, large loss of chlorosilane, etc., and achieves reduction of resource consumption, improvement of purity, and reduction of emissions wasteful effect

Pending Publication Date: 2019-07-12
SICHUAN YONGXIANG POLY SILICON
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Problems solved by technology

[0003] The technical problem to be solved and the technical task proposed by the present invention are to improve the existing technology and provide a chlorosilane refining system, which solves the problems of the chlorosilane refining system in the current technology that it is difficult to effectively remove impurities, the refining effect is poor, and the loss of chlorosilane is large The problem

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  • Chlorosilane refining system and method
  • Chlorosilane refining system and method
  • Chlorosilane refining system and method

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Embodiment Construction

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0021] The chlorosilane refining system disclosed in the embodiment of the present invention can effectively purify chlorosilane, has high refining purity and high refining efficiency, reduces waste of chlorosilane, and reduces production cost.

[0022] A method for refining chlorosilane, which adopts the method of cooling crystallization and static sedimentation to separate metal chlorides to obtain high-purity chlorosilane. Specifically, cooling the liquid in...

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Abstract

The invention discloses a chlorosilane refining system. The chlorosilane refining system comprises a first rectifying tower, a cooling and stirring device, a settling separation device and a second rectifying tower. Tower kettle liquid of the first rectifying tower is delivered to the cooling and stirring device for cooling crystallization treatment to obtain a crystalline mixture; the crystallinemixture is delivered to the settling separation device for standing settling separation; crystalline slag separated by standing settling is discharged from a slag discharge port of the settling separation device; liquid separated by standing settling is then delivered to the second rectifying tower for rectifying treatment; and refined chlorosilane is extracted from the top of the second rectifying tower. According to the chlorosilane refining system, the tower kettle liquid subjected to rectification treatment is subjected to cooling crystallization and standing settling separation, metal chloride is effectively removed, high-purity chlorosilane is obtained through refining, the purity of the chlorosilane is improved, the discharge waste of the chlorosilane is reduced, the refining efficiency of the chlorosilane is improved, the resource consumption is reduced, and the production cost is also reduced.

Description

technical field [0001] The invention relates to the technical field of polysilicon production, in particular to a chlorosilane refining system and refining method. Background technique [0002] In the semiconductor industry, chlorosilane is used as an important raw material for the production of polysilicon. The raw material contains impurities, mainly metal chlorides. The existence of impurities will affect the purity of polysilicon products. In the prior art, cascaded rectification towers are used to refine and purify chlorosilanes. The difficulty in the purification of chlorosilanes lies in the fact that impurities and chlorosilanes have close boiling points, which are difficult to be effectively removed by traditional rectification methods, and the purification effect is poor, wasting more chlorosilanes. Contents of the invention [0003] The technical problem to be solved and the technical task proposed by the present invention are to improve the existing technology ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/107
CPCC01B33/10778
Inventor 袁中华何鹏
Owner SICHUAN YONGXIANG POLY SILICON
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