Device and method of detecting polished quartz wafer shallow scratch
A technology for quartz wafers and polishing wafers, which is used in measurement devices, optical testing of flaws/defects, and material analysis by optical means to improve efficiency and stability and reduce workstations.
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[0044]The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0045] see figure 1 Shown is a schematic diagram of the structure of the device for detecting shallow scratches on polished quartz wafers according to an embodiment of the present invention, see figure 2 Shown is the top view of the device structure of the polished quartz wafer shallow scratch detection of the embodiment of the present invention, see image 3 Shown is a schematic diagram of a part of the detection mechanism of the embodiment of t...
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