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Notched Quartz Macroring Polishing Process

A technology of quartz and notch, which is applied in the polishing process of quartz macrorings, can solve problems such as easy bursting, and achieve the effects of reducing the probability of bursting, reducing subsequent bursting, and reducing polishing time

Active Publication Date: 2020-04-28
HUZHOU DONGKE ELECTRONICS QUARTZ
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The invention adopts electrochemical technology for high-temperature polishing, which has a good polishing effect and solves the problem that high-temperature polished products are easy to burst

Method used

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  • Notched Quartz Macroring Polishing Process
  • Notched Quartz Macroring Polishing Process

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] Embodiment 1: the quartz macroring polishing process with notch, comprises the following steps:

[0034] A. Grinding outer diameter;

[0035] B. Clean the polished quartz ring;

[0036] C. Keep the axis of the large quartz ring horizontal and place it on the workbench, so that the notch of the large quartz ring is at the midpoint of the quarter arc with the highest point of the large quartz ring as the endpoint;

[0037] D. Slowly push the large quartz ring into the annealing furnace for heating. When the temperature of the annealing furnace rises to 950°C, stop heating and slowly drag the large quartz ring out;

[0038] E. Perform high-temperature polishing on the half circumference of the upper part of the large quartz ring by means of flame jetting, first polish the notch, then polish the edges on both sides, and finally polish the inner and outer walls;

[0039] F. Slowly push the quartz macroring into the annealing furnace for annealing;

[0040] G. To check the...

Embodiment 2

[0052] Embodiment 2: the quartz macroring polishing process with notch, comprises the following steps:

[0053] A. Grinding outer diameter;

[0054] B. Clean the polished quartz ring;

[0055] C. Keep the axis of the large quartz ring horizontal and place it on the workbench, so that the notch of the large quartz ring is at the midpoint of the quarter arc with the highest point of the large quartz ring as the endpoint;

[0056] D. Slowly push the large quartz ring into the annealing furnace for heating. When the temperature of the annealing furnace rises to 950°C, stop heating and slowly drag the large quartz ring out;

[0057] E. Perform high-temperature polishing on the half circumference of the upper part of the large quartz ring by means of flame jetting, first polish the notch, then polish the edges on both sides, and finally polish the inner and outer walls;

[0058] F. Slowly push the quartz macroring into the annealing furnace for annealing;

[0059] G. To check the...

Embodiment 3

[0071] Embodiment 3: the quartz macroring polishing process with notch, comprises the following steps:

[0072] A. Grinding outer diameter;

[0073] B. Clean the polished quartz ring;

[0074] C. Keep the axis of the large quartz ring horizontal and place it on the workbench, so that the notch of the large quartz ring is at the midpoint of the quarter arc with the highest point of the large quartz ring as the endpoint;

[0075] D. Slowly push the large quartz ring into the annealing furnace for heating. When the temperature of the annealing furnace rises to 950°C, stop heating and slowly drag the large quartz ring out;

[0076] E. Perform high-temperature polishing on the half circumference of the upper part of the large quartz ring by means of flame jetting, first polish the notch, then polish the edges on both sides, and finally polish the inner and outer walls;

[0077] F. Slowly push the quartz macroring into the annealing furnace for annealing;

[0078] G. To check the...

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Abstract

The invention discloses a polishing process for a large quartz ring provided with a notch. The polishing process comprises the following steps of: (A) polishing the outer diameter; (B) carrying out washing; (C) placing the large quartz ring on a worktable in a manner that the axis is kept to be horizontal so that the notch of the large quartz ring is positioned at the midpoint of 1 / 4 of the circular arc which takes the highest point of the large quartz ring as the end point; (D) slowly pushing the large quartz ring into an annealing furnace and heating the annealing furnace, stopping heating when the temperature of the annealing furnace is increased to 950 DEG C, and pulling out the large quartz ring; (E) carrying out high-temperature polishing on the half circumference of the upper part of the large quartz ring by means of flame jetting (F) pushing the large quartz ring into the annealing furnace for annealing; (G) checking the stress, rotating the large quartz ring by 180 degrees along the axis, and carrying out high-temperature polishing on the unpolished parts of the large quartz ring by means of flame jetting; (H) pushing the large quartz ring into the annealing furnace for annealing again; and (I) inspecting a finished product. The polishing process disclosed by the invention adopts an electrochemical technology for high-temperature polishing, achieves a good polishing effect and solves the problem about easy burst of high-temperature polished products.

Description

technical field [0001] The invention relates to a polishing process for a large quartz ring, in particular to a polishing process for a large quartz ring with notches. Background technique [0002] Polishing refers to the use of mechanical, chemical or electrochemical effects to reduce the surface roughness of the workpiece to obtain a bright, smooth surface. Our common method is to use mechanical methods, polishing tools and abrasive particles or other polishing media to polish the workpiece. The surface is modified and processed. When polishing, the high-speed rotating polishing wheel (peripheral speed is above 20 m / s) is pressed against the workpiece, so that the abrasive can roll and micro-cut the surface of the workpiece, so as to obtain a bright processed surface. However, with the continuous development of the semiconductor industry, a high-grade silicon carbide wafer has appeared in foreign semiconductors. When producing this wafer, a large quartz ring with a notch i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B1/00C03B29/00C03B25/00
CPCB24B1/00C03B25/00C03B29/00
Inventor 张彩根
Owner HUZHOU DONGKE ELECTRONICS QUARTZ
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