Semiconductor packaging structure and manufacturing method thereof
A packaging structure and semiconductor technology, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, semiconductor/solid-state device components, etc., can solve the problems of low integration of antenna packaging structure, complicated preparation process, and high preparation cost, and achieve economical preparation Effects of cost, simplification of preparation process, reduction in size and volume
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Embodiment 1
[0056] see figure 1 , the invention provides a method for preparing a semiconductor package structure, the method for preparing a semiconductor package structure includes the following steps:
[0057] 1) providing a glass substrate, the glass substrate comprising a first surface and a second surface opposite to the first surface;
[0058] 2) forming a first antenna layer on the first surface of the glass substrate, and forming a second antenna layer on the second surface of the glass substrate;
[0059] 3) forming an electrical connection structure on the surface of the second antenna layer away from the glass substrate;
[0060] 4) forming a plastic seal layer on the second surface of the glass substrate, and the plastic seal layer seals the second antenna layer and the electrical connection structure;
[0061] 5) forming a rewiring layer on the surface of the plastic sealing layer away from the glass substrate, and the rewiring layer is electrically connected to the electr...
Embodiment 2
[0099] Please combine Figure 2 to Figure 8 refer to Figure 9 , the present invention also provides a semiconductor packaging structure, the semiconductor packaging structure comprising: a glass substrate 10, the glass substrate 10 includes a first surface and a second surface opposite to the first surface; a first antenna layer 11, The first antenna layer 11 is located on the first surface of the glass substrate 10; the second antenna layer 12, the second antenna layer 12 is located on the second surface of the glass substrate 10; the electrical connection structure 13, the electrical The connection structure 13 is located on the surface of the second antenna layer 12 away from the glass substrate 10; the plastic sealing layer 14, the plastic sealing layer 14 is located on the second surface of the glass substrate 10, and the plastic sealing layer 14 seals the first Two antenna layers 12 and the electrical connection structure 13 are plastic-encapsulated; a re-wiring layer ...
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