Atomic force microscope real-time drift compensation system and method based on vision sensing

Abstract

The invention relates to an atomic force microscope real-time drift compensation system and method based on vision sensing. The system comprises an atomic force microscope, a position adjustable sample platform, an optical microscope, a high speed camera and two microspheres. The atomic force microscope is placed on the position adjustable sample platform; the position adjustable sample platform is placed on a coarse tuning platform of the optical microscope; an observation sample is placed on the position adjustable sample platform; the high speed camera is connected with the optical microscope and acquires an image by cooperating with an objective lens of the microscope; and the two microspheres are respectively located on the upper surface of the sample and a reference probe of the atomic force microscope. The method comprises the following steps: processing a microsphere image acquired by the high speed camera, calculating to obtain a relative position of the microspheres, and thenobtaining drift of the sample relative to a work probe; and according to the drift, calculating a correction signal, and attaching the correction signal to a driving signal of the atomic force microscope, so as to realize real-time compensation on the drift. The system and method which are provided by the invention can realize measurement and compensation on drift in three directions without adopting additional equipment.

Description

technical field [0001] The invention relates to a system and method for real-time drift compensation of an atomic force microscope based on visual sensing. Specifically, the real-time drift measurement between the sample and the probe is realized by image processing the microsphere image, and the piezoelectric The scanner applies a correction signal to achieve drift compensation. It belongs to the field of micro-nano and mechatronics. Background technique [0002] With the continuous deepening of research in the microscopic field, the precision of micro-nano measurement becomes more and more important. At present, common high-resolution micro-nano measurement instruments mainly include scanning probe microscopes represented by atomic force microscopes. Atomic force microscopy uses intermolecular forces to measure the topography of sample surfaces. However, due to the creep and hysteresis of piezoelectric ceramics, environmental temperature changes or external vibrations, ...

AI Technical Summary

Problems solved by technology

Among them, the optimized structural design can only reduce the theoretical error to a certain extent, but cannot eliminate the drift caused by the inherent properties of piezoelectric ceramics and the external environment.

Due to the complex structure of the atomic force microscope and the narrow operating space around the probe, there are large installation problems in the additional sensor on the atomic force microscope, which is not conducive to practical operation

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