Two-dimensional Lamb wave resonator

A Lamb wave resonator and positive electrode technology, applied in the field of resonators, can solve the problems of no solution to Lamb wave coupling effect, affecting signal transmission quality, affecting device performance, etc.

Active Publication Date: 2019-08-09
武汉敏声新技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, the spurious mode of the Lamb wave resonator also seriously affects the performance of the device, specifically manifested in the generation of many ripples around the resonance peak of the impedance curve, which in turn affects the quality of signal transmission
[0005] In response to the above problems, the patent of Tianjin University (CN 105337586 A) discloses a structure that can significantly eliminate the spurious mode of the Lamb wave resonator, but it is still a one-dimensional Lamb wave resonator, and the electromechanical Coupling coefficient and quality factor did not improve significantly
In the current research field, only the properties of one-dimensional Lamb wave resonators are studied, and there is no solution for how to use the coupling effect of Lamb waves propagating in other directions.

Method used

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Embodiment 1

[0038] Embodiment 1 provides a two-dimensional Lamb wave resonator, such as figure 2 As shown, it includes: a first electrode array and a second electrode array; the first electrode array and the second electrode array are respectively arranged on the upper and lower surfaces of the piezoelectric layer 14 .

[0039]The first electrode array includes a plurality of first positive electrode columns and a plurality of first negative electrode columns arranged along a first direction, and the first positive electrode columns and the first negative electrode columns are arranged alternately; the The first positive electrode column includes a plurality of first positive electrodes, and two adjacent first positive electrodes are connected by a bridge 13; the first negative electrode column includes a plurality of first negative electrodes, and two adjacent The first negative electrodes are connected through a bridge 13 .

[0040] The second electrode array includes a plurality of s...

Embodiment 2

[0050] Embodiment 2 provides a two-dimensional Lamb wave resonator, such as Figure 6 Shown is a two-dimensional Lamb wave resonator of an inclined bridge. On the upper and lower surfaces of the piezoelectric layer 24, positive electrodes 21 (circular electrodes with positive voltage) and negative electrodes 22 (circular electrodes with negative voltage) are arranged uniformly, thereby applying alternating current to the upper and lower surfaces of the piezoelectric layer 24. Voltage. A plurality of positive electrodes 21 are connected through a bridge 23, and a plurality of negative electrodes 22 are connected through a bridge 23. The bridge 23 may or may not be in contact with the surface of the piezoelectric material. The orientation of the bridge 23 is non-parallel to the x and y axes. The electrode directions of the upper surface and the lower surface of the piezoelectric layer 24 are vertically intersecting.

Embodiment 3

[0052] Embodiment 3 provides a two-dimensional Lamb wave resonator, such as Figure 7 Shown is a two-dimensional Lamb wave resonator with square electrodes. Positively charged square electrodes 31 and negatively charged square electrodes 32 are evenly arranged on the upper and lower surfaces of the piezoelectric layer 34 , so that AC voltage is applied on the upper and lower surfaces of the piezoelectric layer 34 . A plurality of square electrodes 31 with positive voltages are connected through a bridge 33 , and a plurality of square electrodes 32 with negative voltages are connected through a bridge 33 . The bridge 33 may or may not be in contact with the surface of the piezoelectric layer 34 . If the direction of the bridges 33 on the upper surface of the piezoelectric layer 34 is arranged in parallel along the y-axis, the direction of the bridges 33 on the lower surface of the piezoelectric layer 34 is arranged along the x-axis.

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Abstract

The invention belongs to the technical field of resonators and discloses a two-dimensional Lamb wave resonator which is characterized in that a first electrode array and a second electrode array are arranged on the upper surface and the lower surface of a piezoelectric layer, each of the first electrode array and the second electrode array comprises a plurality of positive electrode columns and first negative electrode columns which are arranged along a first direction and a second direction, and the positive electrode columns and the negative electrode columns are alternately arranged; the positive electrode columns comprise a plurality of positive electrodes, every two adjacent positive electrodes are connected through a bridge, the negative electrode columns comprise a plurality of negative electrodes, and every two adjacent negative electrodes are connected through a bridge; the first direction is perpendicular to the second direction; the orthographic projection of any one of thepositive electrodes in the first electrode array to the second electrode array covers one of the negative electrodes, and the orthographic projection of any one of the negative electrodes in the firstelectrode array to the second electrode array covers one of the positive electrodes. The two-dimensional Lamb wave resonator provided by the invention can improve the electromechanical coupling coefficient of the resonator and reduce the parasitic modes.

Description

technical field [0001] The invention relates to the technical field of resonators, in particular to a two-dimensional Lamb wave resonator. Background technique [0002] The radio frequency filter is a key link in the communication field. The filter is built by a resonator. Therefore, the performance of the resonator directly affects the communication quality. In the current market, surface acoustic wave resonators (SAW Resonators) and bulk acoustic wave resonators (BAW Resonators) occupy the mainstream radio frequency field due to their excellent performance, and are currently the most widely used and most mature devices. However, both types of filters have their own drawbacks. The operating frequency of bulk acoustic wave resonators is determined by the thickness of electrodes and piezoelectric materials, and frequency modulation cannot be achieved on the same wafer; the frequency of surface acoustic wave resonators is determined by the distance between interdigital electr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/15
CPCH03H9/15
Inventor 周杰刘婕妤孙成亮徐沁文蔡耀邹杨胡博豪高超
Owner 武汉敏声新技术有限公司
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