Measurement and control method for quartz crystal wafer online grinding based on resonant frequency automatic search mechanism

Abstract

The invention discloses a measurement and control method for quartz crystal wafer online grinding based on a resonant frequency automatic search mechanism. The method comprises the following steps ofdata initialization, the resonant frequency automatic search flow, the tracking frequency measurement flow based on the sweep frequency data mechanism and the inertial navigation flow. The measurementand control method for quartz crystal wafer online grinding based on the resonant frequency automatic search mechanism has the advantages that anti-interference performance is high, operation is stable, statistical parameters are diverse, and crystal wafers are grinded fully automatically.

Description

technical field [0001] The invention relates to the field of quartz wafers, more specifically, it relates to a measurement and control method for online grinding of quartz wafers based on a resonant frequency automatic search mechanism. Background technique [0002] The electronic information industry is a pillar industry of the national economy, and quartz crystal oscillators play an extremely important role in the electronic information industry. China is a big producer of quartz crystal oscillators, but there is still a big gap in product quality compared with developed countries. In recent years, the industry has developed very rapidly, and the demand for high-precision frequency analysis and monitoring equipment for on-line ground quartz wafers in the production process of quartz crystal oscillators is also increasing, and at the same time, higher requirements are put forward for the measurement and control capabilities of the equipment. [0003] Quartz wafer grinding ...

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Problems solved by technology

However, the ALC system only provides the control strategy of "stopping at the grinding target frequency", and does not involve the monitoring of parameters such as grinding rate and frequency dispersion, as well as the corresponding control strategy and abnormal strategy, which makes it unable to control grinding sand, quartz, etc. Monitor the status of the wafer grinding carrier and the grinding disc surface, and effectively judge and deal with the abnormal conditions that occur during the grinding process

[0008] Therefore, in combination with the actual production research and exploration of quartz chip online frequency measurement technology, get rid of the traditional ALC system architecture, aim at "frequency measurement value jumps in certain frequency bands" and "display frequency after starting frequency measurement" in online frequency measurement and control methods It is very urgent and necessary to solve the problems of "wrong value", "susceptible to external interference", "unable to accurately monitor the status of the grinding machine in real time"

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