Novel structure low-temperature pump
A new structure, cryogenic pump technology, applied in the direction of pumps, pump components, variable capacity pump components, etc., can solve the problems of inability to accurately monitor the displacement, the length of the cryopump connecting rod, the scale of the gasifier, etc., to improve the process performance, ensure accurate work, and facilitate maintenance.
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[0028] attached Figure 1-4 It is a specific embodiment of the present invention. The invention is a new structure cryopump, which includes a cold end area 001, a gaseous cooling area 002 and a hot end area 003. A gaseous cooling area 002 is provided between the cold end area 001 and the hot end area 003. The cold end area 001 includes Cold-end pump body 01, cold-end piston 02, cold-end connecting rod 18, etc. The cold-end pump body 01 is provided with a cold-end piston 02, and the end of the cold-end piston 02 is designed as a ring groove opening, and the cold-end connecting rod 18 The head is installed in the open ring groove of the piston, and the head of the cold end pump body 01 is equipped with a bellows 04, a filter 05, a ball seat 06, a liquid valve 09 and the first steel ball 08, and the first steel ball 08 is installed on the ball seat In the channel between the cone surface of 06 and the cone surface of liquid valve 09, a one-way valve body 15 and an air outlet joi...
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