Microcell LIBS plasma spectral collection system

A technology of plasma spectroscopy and collection system, which is applied in the direction of material analysis, measuring devices, and instruments through optical means, which can solve the problems of increased ablation spot, high cost and technical difficulty of double-pulse hardware, and reduced micro-area LIBS detection resolution. Ratio and other issues, to achieve the effect of improving stability, increasing spectral signal strength, and improving collection efficiency

Inactive Publication Date: 2019-09-10
SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

The increase of laser energy will indirectly lead to the increase of ablation spot, which will reduce the detection resolution of micro-area LIBS, so it is not applicable
The hardware cost and technical difficulty involved in double pulse are high, and it is not an optimal solution

Method used

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  • Microcell LIBS plasma spectral collection system
  • Microcell LIBS plasma spectral collection system
  • Microcell LIBS plasma spectral collection system

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Embodiment Construction

[0027] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0028] Such as Figure 1-2 As shown, a micro-area LIBS plasma spectrum collection system provided by the present invention includes a focusing actuator 1, a collection bracket 2, a focusing microscope objective lens 3, a lens barrel adjustment frame 4, a collection lens barrel 5, and a collection optical fiber 6 And the protective atmosphere cover 7, wherein the fixed end of the focal actuator 1 is connected with the laser light path 12, the driving end is connected with the collection bracket 2, the lower center of the collection bracket 2 is connected with the focusing microscope objective lens 3, and the lower two sides are respectively connected with two The lens barrel adjustment frame 4 is connected, and a collection lens barrel 5 is install...

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Abstract

The invention belongs to the technical field of optics, and particularly relates to a microcell LIBS plasma spectral collection system. The system comprises a focusing actuator, a collection bracket,a focusing microobjective, lens cone adjusting frames, collection lens cones, a collection optical fiber and a protection atmosphere cover, wherein the fixed end of the focusing actuator is connectedwith a laser light path and the driving end of the focusing actuator is connected with the collection bracket; the lower center of the collection bracket is connected with the focusing microobjectiveand the two lower sides of the collection bracket are respectively connected with the two lens cone adjusting frames; the lens cone adjusting frames are internally provided with the collection lens cones; the collection lens cones are obliquely laid relative to the laser light path; the collection optical fiber is connected with the collection lens cones; and the protection atmosphere cover is connected with the downward side of the collection bracket and contains the focusing microobjective and the collection lens cones in the internal space of the protection atmosphere cover. The system is capable of realizing the aims of close-range high-efficiency spectral collection, local area argon shield enhancement, automatic focusing and follow-up collection.

Description

technical field [0001] The invention belongs to the field of optical technology, in particular to a micro-area LIBS plasma spectrum collection system. Background technique [0002] Laser-induced breakdown spectroscopy (LIBS) detection technology is an efficient and fast spectral analysis technology, which can give the composition information of the detected sample in a few seconds or less. At present, most LIBS detection spot sizes are concentrated in the range of hundreds of microns to millimeters, while micro-area LIBS (detection spot size reaches the micron level) is rarely studied and applied. In the detection of micro-area LIBS, due to the small size of the plasma, there are few materials that are induced to break down, resulting in a weak plasma emission spectrum. How to improve the spectral intensity and complete spectral collection efficiently and stably is a key technical problem that must be solved. There are two ways to solve the above key problems, one is to inc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/63G01N21/01
CPCG01N21/01G01N21/63G01N2021/0112
Inventor 郑黎明汪为孙兰香
Owner SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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