Three-dimensional surface shape measuring method based on two-dimensional sparse S-transform fast frequency domain dephasing
A technology of three-dimensional surface shape and measurement method, which can be used in measurement devices, instruments, optical devices, etc., and can solve the problems of low three-dimensional surface shape measurement accuracy.
Active Publication Date: 2019-09-13
XIAN UNIV OF TECH
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[0004] The purpose of the present invention is to provide a three-dimensional surface shape measurement method based on two-dimensional sparse S-transform fast frequency domain phase resolution, which solves the problem of low accuracy of three-dimensional surface shape measurement in the prior art
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[0078] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0079] The present invention is based on a two-dimensional sparse S-transform fast frequency-domain phase resolution three-dimensional surface shape measurement method, the flow chart is as follows figure 1 As shown, the specific steps are as follows:
[0080] Step 1. Project the sinusoidal structured grating to the object to be measured, and collect the deformed grating modulated by the height distribution of the measured object. The expressions of the sinusoidal structured grating and the deformed grating are as follows:
[0081]
[0082]
[0083] In the formula, A(x,y) is the background light field, B(x,y) is the fringe contrast, f 0u is the spatial carrier frequency in the horizontal direction, f 0v is the space carrier frequency in the vertical direction, is the initial phase of the sinusoidal structured grating, let the initia...
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The invention discloses a three-dimensional surface shape measuring method based on two-dimensional sparse S-transform fast frequency domain dephasing, and the method comprises the following steps offirstly, projecting a sinusoidal structure grating to an object to be measured, collecting a deformed grating subjected to height distribution modulation of the object to be measured, and then obtaining a four-dimensional two-dimensional sparse S-transform coefficient matrix through a deformed fringe pattern obtained by two-dimensional sparse S-transform processing; obtaining a phase from the two-dimensional sparse S-transform coefficient matrix to obtain a truncation phase wrapped between [-pi, +pi]; and finally, performing phase expansion on the truncation phase to obtain continuously distributed natural phases, and obtaining the three-dimensional surface shape distribution of the object to be measured according to the modulation relation between the phase and the height distribution. The three-dimensional surface shape measuring method based on two-dimensional sparse S-transform fast frequency domain dephasing solves the problem of low three-dimensional surface shape measurement precision in the prior art.
Description
technical field [0001] The invention belongs to the technical field of grating projection three-dimensional object surface shape measurement, and in particular relates to a three-dimensional surface shape measurement method based on two-dimensional sparse S transform fast frequency domain phase resolution. Background technique [0002] Grating projection three-dimensional object surface shape measurement technology, by analyzing the obtained deformed grating pattern, the phase change of the deformed grating modulated by the height of the object to be measured can be obtained, and the three-dimensional surface shape height distribution information of the object to be measured can be obtained. [0003] In recent years, the time-frequency analysis method has been widely used in the field of optical three-dimensional surface shape measurement. The S-transform is a new way of time-frequency analysis, which has the advantage of fast measurement speed, but the measurement accuracy i...
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IPC IPC(8): G01B11/25
CPCG01B11/25
Inventor 满蔚仕侯凯
Owner XIAN UNIV OF TECH