A method and system for measuring moment of inertia based on active vibration isolator

Abstract

The present invention belongs to the field of rotational inertia measurement, and particularly discloses a rotational inertia measuring method and system based on active vibration isolators. The method comprises: supporting loads in different positions by using two or more active vibration isolators; then simultaneously exciting, by each active vibration isolator, the loads, controlling an outputamplitude so that the loads rotate only along one direction, and measuring the response amplitudes of the active vibration isolators at this time; placing standard mass blocks on both sides of load centroids at equidistance, simultaneously exciting, by each active vibration isolator, the loads again, controlling the output amplitude so that the loads still rotate only along one direction, and measuring the response amplitudes of the active vibration isolators at this time; and finally determining the rotational inertia of the loads in the direction of rotation through a relationship between the output amplitudes and the response amplitudes of the active vibration isolators at the front and rear of the placed standard mass blocks. The method is simple, rapid and high in precision, and directly uses the active vibration isolators for measurement so that the influence on precision equipment is little.

Description

technical field [0001] The invention belongs to the field of moment of inertia measurement, and more particularly relates to a method and system for measuring moment of inertia based on an active vibration isolator. Background technique [0002] With the advancement of engineering technology, the application of ultra-precision equipment represented by lithography machines and scanning electron microscopes is becoming more and more extensive, and its manufacturing and measurement accuracy is getting closer and closer to the physical limit. In the process of micro / nano processing or measurement, environmental vibration has become a bottleneck problem restricting its accuracy. In order to reduce vibration, precision processing equipment and instruments such as lithography machines and scanning electron microscopes need to be placed on precision active vibration isolators for work . [0003] The commonly used methods for measuring the moment of inertia include three-wire pendul...

AI Technical Summary

Problems solved by technology

[0003] The commonly used methods for measuring the moment of inertia include three-wire pendulum, torsion pendulum, and compound pendulum. The measurement of inertia cannot be carried out by the above methods

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