MEMS (Micro-Electro-Mechanical System) inertial sensor based on diamagnet suspension

Abstract

The invention discloses an MEMS (Micro-Electro-Mechanical System) inertial sensor based on diamagnet suspension. The MEMS inertial sensor comprises deep silicon etched grooves, a suspended permanent magnet, a fixed permanent magnet and diamagnetic materials, wherein the deep silicon etched grooves internally have closed spaces and are obtained by etching out middle regions of supporting layers inSOI silicon chips; the suspended permanent magnet is positioned in the closed spaces of the deep silicon etched grooves; the fixed permanent magnet is fixed to the top outside an upper etched groove and is used for providing a suspension force acted on the suspended permanent magnet to overcome a gravity of the suspended permanent magnet, so that the suspended permanent magnet is suspended in theclosed spaces; the diamagnetic materials are symmetrically fixed inside the deep silicon etched grooves and provides symmetrical diamagnetic forces to the suspended permanent magnet; when the MEMS inertial sensor is applied with an external acting force to cause a change of a position of the suspended permanent magnet, the diamagnetic forces are used as elasticity-like resilience forces for restraining the position of the suspended permanent magnet; and a displacement of the suspended permanent magnet is used for determining a spatial inertial acceleration corresponding to the external actingforce. The inertial sensor disclosed by the invention is not influenced by a friction force.

Description

technical field [0001] The invention relates to the technical field of processing and manufacturing of microelectronic devices, and more particularly, relates to a MEMS inertial sensor based on anti-magnet levitation. Background technique [0002] Near the surface, the earth's gravitational field is one of the most basic and important physical fields, which is of great significance to the precise measurement of the gravitational field. Gravity measurement has broad application prospects in resource exploration, auxiliary navigation, national defense and earth science. Taking the acceleration of gravity sensor as an example, the acceleration of gravity sensor is a precision gravity measurement sensor that measures small changes in the acceleration of gravity. [0003] The basic model of the mechanical structure of the acceleration of gravity sensor is a spring-oscillator structure, which is composed of a spring, a proof mass, and damping caused by air or structure. The proof...

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Problems solved by technology

[0006] Aiming at the defects of the prior art, the purpose of the present invention is to solve the problem that the existing gravitational acceleration sensor requires external energy, the spring and the mass block directly contact to generate friction, the friction affects the performance of the sensor, energy dissipation, and its resolution is limited The noise level of the system and the technical problems that the existing MEMS gravity acceleration sensor cannot take advantage of the MEMS process

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