A kind of preparation method of MEMS inertial sensor based on diamagnetic suspension

Abstract

The invention discloses a preparation method of an MEMS inertial sensor based on anti-magnet suspension. The preparation method comprises the steps of: determining the positions of four etching grooves to be etched on a supporting layer of an SOI silicon wafer; etching the four etching grooves to be etched in the supporting layer of the SOI silicon wafer; etching a plurality of insulating layer release holes in a device layer of the SOI silicon wafer; removing a corresponding insulating layer in a middle area of the supporting layer through the insulating layer release holes to obtain the etching grooves; symmetrically disposing diamagnetic materials on the walls of the grooves, and aligning the etching grooves of the two device diamagnetic materials for packaging; disposing a fixed permanent magnet on top of the outer side of the upper etching groove to provide a suspension force acting on a suspended permanent magnet; placing the suspended permanent magnet in a closed space formed by two etching grooves; providing an diamagnetic force for the suspended permanent magnet by the diamagnetic materials; and when the position of the suspended permanent magnet changes, serving the diamagnetic force as a quasi-elastic restoring force, and using the displacement of the suspended permanent magnet to determine an external inertial acceleration. The inertial sensor prepared by the preparation method disclosed by the invention is not affected by friction.

Description

technical field [0001] The invention relates to the technical field of processing and manufacturing of microelectronic devices, and more particularly, relates to a preparation method of a MEMS inertial sensor based on diamagnetic levitation. Background technique [0002] Near the surface, the earth's gravitational field is one of the most basic and important physical fields, which is of great significance to the precise measurement of the gravitational field. Gravity measurement has broad application prospects in resource exploration, auxiliary navigation, national defense and earth science. Taking the acceleration of gravity sensor as an example, the acceleration of gravity sensor is a precision gravity measurement sensor that measures small changes in the acceleration of gravity. [0003] The basic model of the mechanical structure of the acceleration of gravity sensor is a spring-oscillator structure, which is composed of a spring, a proof mass, and damping caused by air...

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Problems solved by technology

[0005] Aiming at the defects of the prior art, the purpose of the present invention is to solve the problem that the existing gravitational acceleration sensor requires energy from the outside world, and the direct contact between the spring and the mass produces friction, which affects the performance of the sensor and dissipates energy. The existence of flexible springs leads to technical problems that are difficult to prepare

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