Method and device for extracting magneto-rheological polishing removal function

A technology of magnetorheological polishing and extraction method, which is applied in the direction of complex mathematical operations, etc., can solve the problems of difficulty in accurately extracting the effective data of the magnetorheological polishing removal function, reducing the accuracy of magnetorheological processing, etc. The effect of improving accuracy

Active Publication Date: 2019-09-17
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

[0005] In view of the above problems, the purpose of the present invention is to solve the problem that the traditional method is difficult to accurately extract the effective data of the removal function of magnetorheological polishing, thereby reducing the accuracy of magnetorheological processing

Method used

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  • Method and device for extracting magneto-rheological polishing removal function
  • Method and device for extracting magneto-rheological polishing removal function
  • Method and device for extracting magneto-rheological polishing removal function

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Embodiment 1

[0102] For example, the spot mining operation in this embodiment is carried out on a domestic magnetorheological machine tool, and the spot picking substrate material is fused silica, which is a circular substrate with a diameter of 50 mm and a thickness of 5 mm.

[0103] Specifically, such as Image 6 As shown, the extraction of the magnetorheological removal function is carried out by the following method steps.

[0104] 1. To select the spot-collecting substrate component, the surface of the substrate is required to be flat. Choose a fused silica substrate with PV=0.5λ for spot-picking. First, wipe the surface of the component clean, and use scissors to cut out the label paper with a side length of about 5mm. , attach it to the edge of the substrate element;

[0105] 2. Use an interferometer to measure the surface shape of the substrate components, save the detection data, name it start, the initial PV of the substrate = 0.486λ, and the positioning marks are clearly visible,...

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Abstract

The invention discloses a method and device for extracting a magneto-rheological polishing removal function. The method comprises the following steps of acquiring the surface shape detection data of a substrate element before and after spot collection, wherein the edge of the substrate element is provided with a position mark; according to the surface shape detection data before and after speckle collection and the position mark of the substrate element, calculating to obtain the residual data; carrying out median filtering processing on the residual data; for the residual error data after filtering processing, adopting an elliptic arc to approach the contour of a removal function, and generating a plurality of removal functions containing the same parameters; and executing the data offset on the plurality of removal functions containing the same parameters, averaging, and extracting the removal functions. According to the method, the magneto-rheological polishing removal function can be accurately extracted, and the accuracy of the removal function and the magneto-rheological machining precision are improved.

Description

technical field [0001] The invention relates to the field of optical processing, in particular to a method and device for extracting a magneto-rheological polishing removal function. Background technique [0002] Magneto-rheological polishing technology is an emerging optical surface precision processing technology, which has many advantages such as no sub-surface defects, easy realization of numerical control precision control, high processing precision, and high polishing efficiency. Magneto-rheological polishing technology is widely used in the polishing of large-aperture planar optical elements, the molding of continuous phase plates (CPP), and the fine polishing of aspheric optical elements, which is of great significance to the processing of high-precision optical elements. [0003] The accuracy of magnetorheological removal function is a key factor to achieve highly deterministic magnetorheological processing, which directly determines the processing accuracy of optic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F17/10B24B1/00
CPCG06F17/10B24B1/005
Inventor 唐才学温圣林张远航颜浩嵇保建王翔峰邓燕石琦凯张清华李昂
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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