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MEMS gas sensor and method for improving stability of MEMS gas sensor

A gas sensor and stability technology, applied in the field of sensors, to achieve the effect of improving stability, high sensitivity, and good stability of electrical characteristics

Pending Publication Date: 2019-10-22
BEIJING MECHANICAL EQUIP INST
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The application provides a MEMS gas sensor, a method and a device for improving the stability of the MEMS gas sensor, which can solve the problems in the existing solutions

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  • MEMS gas sensor and method for improving stability of MEMS gas sensor

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Embodiment Construction

[0024] The specific implementation manners of the present application will be further described in detail below in conjunction with the drawings and embodiments. The following examples are used to illustrate the present application, but not to limit the scope of the present application.

[0025] Please refer to figure 1 , which shows a schematic structural diagram of a MEMS gas sensor provided by an embodiment of the present application, as figure 1 As shown, the MEMS gas sensor includes:

[0026] At least one of the sensitive unit based on N-type doped semiconductor material and the sensitive unit based on P-type doped semiconductor material, and the sensitive unit based on P-type intrinsic semiconductor material. in,

[0027] The sensitive unit based on N-type doped semiconductor material is used to detect oxidizing gas, which has high conductivity (low resistance value) at room temperature, and when there is free oxidizing gas in the environment, based on N Sensitive ce...

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Abstract

The application relates to an MEMS gas sensor and a method and a device for improving the stability of the MEMS gas sensor, belonging to the technical field of sensors. The MEMS gas sensor comprises at least one of a sensing element based on an N-type doping semiconductor material and a sensing element based on a P-type doping semiconductor material, and a sensing element based on a P-type intrinsic semiconductor material. The sensing element based on an N-type doping semiconductor material is used for detecting oxidizing gases. The sensing element based on a P-type doping semiconductor material is used for detecting reducing gases. The sensing element based on a P-type intrinsic semiconductor material has stable electrical characteristic, and is used for correcting the electrical drift ofthe sensing element based on an N-type doping semiconductor material and / or the electrical drift of the sensing element based on a P-type doping semiconductor material. The long-term stability can beimproved, and the service life of the sensor can be prolonged.

Description

technical field [0001] The application relates to a MEMS gas sensor and a method for improving the stability of the MEMS gas sensor, belonging to the technical field of sensors. Background technique [0002] Gas sensors are an important part of the MEMS (Microelectro Mechanical Systems, microcomputer system) sensing technology field. Under the constraints of low power consumption, small size and low cost, it is important to achieve high sensitivity to target gases and long-term stability Important technology research and development direction of MEMS gas sensor. The existing main schemes for improving the long-term stability of MEMS gas sensors include: 1. Improving the stability of the sensitive material itself; 2. Controlling the working environment of the gas sensor. [0003] Improving the stability of sensitive materials is of great significance for the improvement of device-level performance. However, due to the limitations of research in the field of MEMS gas-sensitiv...

Claims

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Application Information

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IPC IPC(8): G01N27/12
CPCG01N27/125G01N27/128
Inventor 刘宇航刘秀洁许诺汪晓军
Owner BEIJING MECHANICAL EQUIP INST