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Energy transmission window sheet for terahertz band vacuum device and preparation method thereof

A vacuum device and terahertz technology, which is applied in the manufacture of discharge tubes/lamps, electrical components, cold cathodes, etc., can solve problems affecting the sealing performance and strength of brazing, poor bonding force of metallization layers, and air leakage of energy transmission windows and other issues, to achieve the effect of improving mechanical strength, increasing binding force and reducing transmission loss

Active Publication Date: 2019-11-05
NO 12 RES INST OF CETC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Another problem is that the nucleation surface is usually ultra-nanocrystalline or nanocrystalline diamond, and the surface finish is relatively high (average roughness ≤ 20nm), which makes the bonding force of the subsequent metallization layer poor, easily causing peeling, or falling off. Affect the sealing performance and strength of brazing, and even cause air leakage of the energy transmission window, resulting in failure

Method used

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  • Energy transmission window sheet for terahertz band vacuum device and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] Put the composite diamond on the sample stage of the microwave plasma chemical vapor deposition equipment, and make the nucleation face upward;

[0041] Microwave H on the nucleation surface 2 / O 2 Mixed atmosphere plasma etching, control oxygen flow rate to 5sccm, hydrogen flow rate to 95sccm, air pressure to 13KPa, microwave power to 2.2KW, substrate temperature to 850°C, remove 4μm surface layer containing defects and non-diamond phase on the nucleation surface;

[0042] Then carry out the growth of the microcrystalline diamond film, control the flow of methane to 3sccm, the flow of hydrogen to 300sccm, the air pressure to 18.6KPa, the microwave power to 2.4KW, the substrate temperature to 900°C, and the growth thickness to be 10μm.

[0043] Then, the ultra-nanocrystalline diamond film is grown on the microcrystalline diamond film, and the methane gas flow is controlled to be 1.5 sccm, the argon gas flow is 240 sccm, the hydrogen gas flow is 6 sccm, the air pressure...

Embodiment 2

[0046] Put the composite diamond on the sample stage of the microwave plasma chemical vapor deposition equipment, and make the nucleation face upward;

[0047] Microwave H on the nucleation surface 2 / O 2 Mixed atmosphere plasma etching, control oxygen flow rate to 5sccm, hydrogen flow rate to 95sccm, air pressure to 13KPa, microwave power to 2.2KW, substrate temperature to 850°C, remove 4μm surface layer containing defects and non-diamond phase on the nucleation surface;

[0048] Then carry out the growth of the microcrystalline diamond film, control the flow of methane to 3sccm, the flow of hydrogen to 300sccm, the air pressure to 18.6KPa, the microwave power to 2.4KW, the substrate temperature to 900°C, and the growth thickness to be 10μm.

[0049] Then carry out the growth of nanocrystalline diamond film on the microcrystalline diamond film, control the methane gas flow to be 6sccm, the hydrogen flow to be 200sccm, the air pressure to be 17.3KPa, the microwave power to be...

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Abstract

The invention provides an energy transmission window sheet for a terahertz band vacuum device. The energy transmission window sheet comprises a composite diamond film and a micron crystalline diamondfilm and an ultra-nanocrystalline diamond film or a nanocrystalline diamond film which are sequentially grown on the nucleation surface of the composite diamond film, wherein the nucleation surface ofthe composite diamond film is subjected to the treatment of removing the surface layer containing defects and non-diamond phases. The re-grown ultra-nanocrystalline on the nucleation surface of the energy transmission window sheet has high fracture strength and low THz wave loss. The surface roughness of the nucleation surface can be properly improved by the re-grown micron crystalline diamond sothat the bonding force between the nucleation surface and the subsequent metallization layer can be increased, peeling or falling off the metallization layer can be prevented and the sealing performance and the sealing yield of the energy transmission window can be improved.

Description

technical field [0001] The invention relates to the field of vacuum electronic devices. More specifically, it relates to an energy transmission window for terahertz band vacuum devices and a preparation method thereof. Background technique [0002] Terahertz (THz) vacuum devices have the advantages of high power and wide frequency bandwidth, and have been widely used in radar, guidance, tactical and strategic communications, electronic countermeasures, remote sensing, and radiation measurement. Due to the relatively high frequency of this vacuum device and the small size of the parts, it brings various difficulties to the development, especially the processing and manufacturing of the slow wave structure, attenuator and microwave energy transmission window used in the THz traveling wave tube. in this way. The energy transmission window is one of the important components in the THz traveling wave tube. In order to make the traveling wave tube work normally and provide good...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J9/00C01B32/26
CPCC01B32/26H01J9/00
Inventor 丁明清李莉莉化称意李兴辉韩攀阳潘攀蔡军冯进军
Owner NO 12 RES INST OF CETC
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