Laser preparation method for microchannels of microfluidic chip
Patent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- BEIJING INST OF ELECTRONICS SYST ENG
- Publication Date
- 2019-11-12
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Abstract
Description
technical field
[0001] The invention relates to the field of manufacturing technology of microfluidic chips. More specifically, it relates to a laser preparation method of a microfluidic chip microchannel. Background technique
[0002] With the extension of the research scale, microfluidic chips based on microchannels can realize the overall miniaturization, portability, and integration from sample processing to detection, and transfer the functions of the laboratory to it to the greatest extent. In practical applications, most microfluidic chips need to integrate microfluidic channels of different sizes on compatible materials. Laser etching is a common method for preparing microchannels due to its flexible and convenient operation and controllable channel size. Since the microchannel is the most basic component of the microfluidic chip, its performance directly determines the quality of the chip, and the cross-sectional shape and surface roughness are the most important f...