Laser preparation method for microchannels of microfluidic chip

Abstract

The invention discloses a laser etching preparation method for microchannels of a microfluidic chip. The method comprises the following steps: cleaning the surface of a substrate made from a high-polymer material, so as to remove surface attachments from the substrate; placing the substrate on a mobile platform, etching the substrate by using laser emitted from a gas laser to form microchannels, and meanwhile, measuring out width values of heat-affected zones at two sides of the microchannels; repeatedly carrying out laser etching on the two sides of the microchannels to form microchannels with trapezoidal cross sections, wherein an etched position of last time serves as an origin before each etching, and the mobile platform drives the substrate to transversely translate distances of the width values of the heat-affected zones; and subjecting the laser-etched substrate to annealing treatment, and then, subjecting a cover plate and the substrate to hot-pressing, thereby obtaining the microfluidic chip. According to the method, the trapezoidal microchannels with good morphologies can be obtained by only measuring width values of heat-affected zones of sides after primary etching without complicated calculating and then carrying out etching repeatedly by transversely translating the width values; and the microchannels are flat in bottom face and low in surface roughness.

Description

technical field [0001] The invention relates to the field of manufacturing technology of microfluidic chips. More specifically, it relates to a laser preparation method of a microfluidic chip microchannel. Background technique [0002] With the extension of the research scale, microfluidic chips based on microchannels can realize the overall miniaturization, portability, and integration from sample processing to detection, and transfer the functions of the laboratory to it to the greatest extent. In practical applications, most microfluidic chips need to integrate microfluidic channels of different sizes on compatible materials. Laser etching is a common method for preparing microchannels due to its flexible and convenient operation and controllable channel size. Since the microchannel is the most basic component of the microfluidic chip, its performance directly determines the quality of the chip, and the cross-sectional shape and surface roughness are the most important f...

AI Technical Summary

Problems solved by technology

Triangular cross-sections have problems with limited fluid velocity and large pressure differentials

The shape of the trapezoidal microchannel prepared by this method is better, with only a few gaps, but there is a problem that the secondary laser parameters need complex calculations, and the practicability is not strong

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