A laser fabrication method for microchannels in microfluidic chips

Abstract

The invention discloses a method for preparing a microchannel of a microfluidic chip by laser etching, which comprises the following steps: cleaning the surface of a substrate made of a high polymer material, and removing attachments on the substrate surface; The laser emitted by the laser etches the substrate to form a microchannel. At the same time, the width of the heat-affected zone on both sides of the microchannel is measured; multiple laser etching is performed on both sides of the microchannel to form a microchannel with a trapezoidal cross section. Before each etching, the last etching position is taken as the origin, and the moving platform drives the substrate to translate the distance of the width of the heat-affected zone laterally; the substrate after laser etching is annealed, and then the cover sheet is thermally bonded to the substrate , to obtain a microfluidic chip. This method does not require complex calculations, and only measures the width of the side heat-affected zone after one etching, and then translates the width value laterally for multiple etchings to obtain a trapezoidal microchannel with a flat bottom surface and a flat surface. Small roughness.

Description

technical field [0001] The invention relates to the field of manufacturing technology of microfluidic chips. More specifically, it relates to a laser preparation method of a microfluidic chip microchannel. Background technique [0002] With the extension of the research scale, microfluidic chips based on microchannels can realize the overall miniaturization, portability, and integration from sample processing to detection, and transfer the functions of the laboratory to it to the greatest extent. In practical applications, most microfluidic chips need to integrate microfluidic channels of different sizes on compatible materials. Laser etching is a common method for preparing microchannels due to its flexible and convenient operation and controllable channel size. Since the microchannel is the most basic component of the microfluidic chip, its performance directly determines the quality of the chip, and the cross-sectional shape and surface roughness are the most important f...

AI Technical Summary

Problems solved by technology

Triangular cross-sections have problems with limited fluid velocity and large pressure differentials

The shape of the trapezoidal microchannel prepared by this method is better, with only a few gaps, but there is a problem that the secondary laser parameters need complex calculations, and the practicability is not strong

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