A laser fabrication method for microchannels in microfluidic chips

A microfluidic chip and microchannel technology, applied in chemical instruments and methods, laboratory containers, laboratory utensils, etc., can solve the problems of limited fluid flow rate, large pressure difference, and poor practicability, etc. Achieve the effect of small surface roughness and flat bottom surface

Active Publication Date: 2021-08-06
BEIJING INST OF ELECTRONICS SYST ENG
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AI Technical Summary

Problems solved by technology

Triangular cross-sections have problems with limited fluid velocity and large pressure differentials
The shape of the trapezoidal microchannel prepared by this method is better, with only a few gaps, but there is a problem that the secondary laser parameters need complex calculations, and the practicability is not strong

Method used

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  • A laser fabrication method for microchannels in microfluidic chips
  • A laser fabrication method for microchannels in microfluidic chips
  • A laser fabrication method for microchannels in microfluidic chips

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Embodiment Construction

[0027] In order to illustrate the present invention more clearly, the present invention will be further described below in conjunction with preferred embodiments and accompanying drawings. Similar parts in the figures are denoted by the same reference numerals. Those skilled in the art should understand that the content specifically described below is illustrative rather than restrictive, and should not limit the protection scope of the present invention.

[0028] The most basic structural unit in a microfluidic chip is a meandering arrangement of microchannels, so the processing of microchannels is the basis for chip fabrication and application. The invention provides a laser preparation method of a microchannel of a microfluidic chip. The method is a laser direct writing etching method, which can adjust the distance between the laser beam and the substrate through a two-dimensional precision displacement system according to a graphic designed by a computer. The relative mov...

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Abstract

The invention discloses a method for preparing a microchannel of a microfluidic chip by laser etching, which comprises the following steps: cleaning the surface of a substrate made of a high polymer material, and removing attachments on the substrate surface; The laser emitted by the laser etches the substrate to form a microchannel. At the same time, the width of the heat-affected zone on both sides of the microchannel is measured; multiple laser etching is performed on both sides of the microchannel to form a microchannel with a trapezoidal cross section. Before each etching, the last etching position is taken as the origin, and the moving platform drives the substrate to translate the distance of the width of the heat-affected zone laterally; the substrate after laser etching is annealed, and then the cover sheet is thermally bonded to the substrate , to obtain a microfluidic chip. This method does not require complex calculations, and only measures the width of the side heat-affected zone after one etching, and then translates the width value laterally for multiple etchings to obtain a trapezoidal microchannel with a flat bottom surface and a flat surface. Small roughness.

Description

technical field [0001] The invention relates to the field of manufacturing technology of microfluidic chips. More specifically, it relates to a laser preparation method of a microfluidic chip microchannel. Background technique [0002] With the extension of the research scale, microfluidic chips based on microchannels can realize the overall miniaturization, portability, and integration from sample processing to detection, and transfer the functions of the laboratory to it to the greatest extent. In practical applications, most microfluidic chips need to integrate microfluidic channels of different sizes on compatible materials. Laser etching is a common method for preparing microchannels due to its flexible and convenient operation and controllable channel size. Since the microchannel is the most basic component of the microfluidic chip, its performance directly determines the quality of the chip, and the cross-sectional shape and surface roughness are the most important f...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01L3/00
CPCB01L3/502707
Inventor 吴天昊
Owner BEIJING INST OF ELECTRONICS SYST ENG
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