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A two-dimensional material transfer method based on an electrically assisted liquid bridge

A two-dimensional material and transfer method technology, applied in the field of two-dimensional material transfer, can solve the problems of difficult to remove glue residue, affect product performance, insufficient transfer power, etc., and achieve the effects of good integrity, low cost and simple operation.

Active Publication Date: 2020-11-17
XI AN JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The existing two-dimensional material transfer methods can be roughly divided into three categories: dry method, wet method, and liquid bridge transfer method. These methods all have problems such as insufficient transfer power, introduction of chemical pollution, and difficulty in removing residual glue.
It is difficult for the electronic devices produced by these methods to really exert the superior characteristics of the two-dimensional materials themselves, which seriously affects the performance of the final overall product

Method used

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  • A two-dimensional material transfer method based on an electrically assisted liquid bridge
  • A two-dimensional material transfer method based on an electrically assisted liquid bridge
  • A two-dimensional material transfer method based on an electrically assisted liquid bridge

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Embodiment Construction

[0033] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

[0034] In this embodiment, the two-dimensional material 5 is graphene, and the transfer of graphene from the original substrate 6 (silicon dioxide substrate) to the target substrate 7 (gold substrate) will be completed, and the transfer operation will be completed in a clean room at a temperature of 20-25 ℃, humidity is 40-60%.

[0035] A two-dimensional material transfer method based on an electrically assisted liquid bridge, comprising the following steps:

[0036] The first step: the graphene sample prepared by the mechanical exfoliation method is used as the two-dimensional material 5, and the silicon dioxide substrate is used as the original substrate 6, and the two-dimensional material 5 is fabricated on the original substrate 6;

[0037] Observing the prepared sample through an optical microscope, select a graphene sample with good quality as ...

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Abstract

A two-dimensional material transfer method based on an electrically aided liquid bridge comprises the following steps: preparing a to-be-transferred sample composed of an original substrate and a two-dimensional material, placing the to-be-transferred sample on a lower electrode, and attaching a flexible support under an upper electrode; forming a first liquid film on the surface of the two-dimensional material and the original substrate, and controlling the movement of the upper electrode to attach the flexible support to adhered to the upper surface of the two-dimensional material and the original substrate in order to form the liquid bridge; applying an external electric field between the upper electrode and the lower electrode to make the flexible support separated from the upper surface of the original substrate and the two-dimensional material transferred onto the flexible support; taking down the original substrate, placing a target substrate on the lower electrode, and forminga second liquid film on the target substrate to closely attach the flexible support adhered with the two-dimensional material to the target substrate in order to form the liquid bridge; and finally applying the external electric field between the upper electrode and the lower electrode to make the flexible support separated from the target substrate and the two-dimensional material transferred onto the target substrate. The method realizes the high-quality and high-efficiency transfer of the two-dimensional material.

Description

technical field [0001] The invention relates to the technical field of two-dimensional material transfer, in particular to a two-dimensional material transfer method based on an electric-assisted liquid bridge. Background technique [0002] Since the discovery of graphene, two-dimensional materials have continuously attracted the attention of researchers from all over the world with their unique mechanical, thermal and optical properties, and invested a lot of energy in their research, and have been widely used in various fields. Almost all existing two-dimensional materials must be grown on corresponding specific substrates, so the use of two-dimensional materials must involve the problem of transferring two-dimensional materials from the original substrate to the target substrate. The existing two-dimensional material transfer methods can be roughly divided into three categories: dry method, wet method, and liquid bridge transfer method. These methods all have problems suc...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B32/194
CPCC01B32/194
Inventor 陈小明李浩邵金友李祥明田洪淼陈小亮王春慧
Owner XI AN JIAOTONG UNIV