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Metalens array and method for non-uniformity correction of infrared detectors

A non-uniformity correction and infrared detector technology, applied in the field of image processing, can solve the problems of large volume, complex correction methods, and high difficulty in assembly

Active Publication Date: 2020-10-23
XIDIAN UNIV
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Problems solved by technology

[0005] The object of the present invention is to provide a metalens array and a method for correcting the non-uniformity of infrared detectors in view of the deficiencies of the above-mentioned prior art, so as to solve the problem of large number of devices, large volume, and high difficulty in assembly in the prior art. It is difficult to meet the problem of integration of infrared imaging system. At the same time, it solves the problem of complex and low real-time performance of existing correction methods. The invention can correct the non-uniformity of the photosensitive element on the infrared detector during the infrared imaging process.

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  • Metalens array and method for non-uniformity correction of infrared detectors
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  • Metalens array and method for non-uniformity correction of infrared detectors

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Embodiment Construction

[0028] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0029] Refer to attached figure 1 , to further describe in detail the structure of the metalens array arranged on the infrared focal plane in the present invention.

[0030] In the present invention, an infrared detector array is grown on a substrate 6 , and the detector array includes a P-N junction 5 , a passivation layer 4 and a contact metal layer 2 . The metalens array 7 is etched on the lower surface layer of the substrate 6, and the metalens in the metalens array 7 is composed of a plurality of composite resonant units, wherein the number of the composite resonant units is determined by the focal length required during design and the number of the metalens. The dimensions are determined together, and the composite resonant units are arranged circularly along the center of the metalens. The detector array and AD conversion circuit 1 are connected thro...

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Abstract

The invention discloses a meta-lens array and a method for correcting the non-uniformity of an infrared detector. The metalens array is etched on the lower surface of the substrate, wherein each detector in the infrared detector array is the same size as each metalens in the metalens array. The method comprises steps: (1) performing radiation measurement on the detector array; (2) scanning the digital-analog image; (3) obtaining the focal length of the metalens corresponding to each sampling point; (4) designing the metalens; (5) ) to generate a metalens array. The invention can reduce the volume of the infrared imaging system, has the advantages of light weight and integration, can timely and effectively correct the non-uniformity in the process of infrared imaging, improve the quality of infrared imaging, and has the characteristics of wide application range and strong real-time performance .

Description

technical field [0001] The invention belongs to the technical field of image processing, and further relates to a metalens array and a method for correcting the non-uniformity of an infrared detector in the technical field of infrared imaging. In the present invention, by adding a set of metalens arrays in front of the infrared detector array at the focal plane, according to the response distribution of the infrared detector, the infrared radiation information is efficiently modulated onto the photosensitive element of the infrared detector, and can be used in the infrared imaging process. , effectively correcting the non-uniformity of the photosensitive element on the infrared detector. Background technique [0002] Infrared imaging is the core of infrared technology, and it is widely used in military equipment, astronomical observation, medical diagnosis and daily life. However, the material and manufacturing process of the infrared detector often lead to non-uniform resp...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J5/08
CPCG01J5/0806G01J5/80
Inventor 吴鑫辛雪倩黄曦刘德连程强张建奇
Owner XIDIAN UNIV
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