Metalens array and method for non-uniformity correction of infrared detectors
A non-uniformity correction and infrared detector technology, applied in the field of image processing, can solve the problems of large volume, complex correction methods, and high difficulty in assembly
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[0028] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0029] Refer to attached figure 1 , to further describe in detail the structure of the metalens array arranged on the infrared focal plane in the present invention.
[0030] In the present invention, an infrared detector array is grown on a substrate 6 , and the detector array includes a P-N junction 5 , a passivation layer 4 and a contact metal layer 2 . The metalens array 7 is etched on the lower surface layer of the substrate 6, and the metalens in the metalens array 7 is composed of a plurality of composite resonant units, wherein the number of the composite resonant units is determined by the focal length required during design and the number of the metalens. The dimensions are determined together, and the composite resonant units are arranged circularly along the center of the metalens. The detector array and AD conversion circuit 1 are connected thro...
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