Open type detection device and method for surface shape and parallel difference of large-size optical window part

Abstract

The invention discloses an open type detection device and method for the surface shape and the parallel difference of a large-size optical window part. The detection device comprises an upper platform, a lower platform, a support, a lifting screw, a guide rail, a sliding block, a locking block, a limiting block, a pitching and rotating adjusting mechanism and an objective table, wherein the upperplatform and the lower platform are leveled through the lifting screw to form an open type test area of the large-size window part. According to the device, an interferometer is installed on the upperplatform, a pitching adjusting mechanism is utilized for enabling a surface image of a part and a standard image of the interferometer to generate interference, interference fringes of the area are obtained, an interference pattern of the area is obtained, local surface shape testing of the large-size window part in the full range is achieved by rotating and horizontally moving the part. Interference patterns are obtained through the interference fringes generated on two faces of the part, the parallel difference of the area is obtained according to an equal-thickness interference parallel difference calculation formula, and local parallel difference testing of the large-size window part in the full range is achieved by rotating and horizontally moving the part.

Description

technical field [0001] The invention belongs to the field of optical window parts processing technology, in particular to an open detection device and detection method for large-scale optical window parts surface shape and parallelism. Background technique [0002] Optical window parts are an important part of the optoelectronic system, and the surface shape and parallelism of the parts directly affect the overall performance of the system. In the on-site processing of parts, Fizeau-type laser plane interferometer is mainly used to detect the surface shape and parallelism of parts, and then guide the correction of surface shape and parallelism in the optical processing process. However, the effective test aperture of the laser plane interferometer currently on the market is up to Φ150mm, and the test area is closed, so it is impossible to test the surface shape and parallelism of the large-size window parts in the full range. Therefore, at present, for large-size optical wi...

AI Technical Summary

Problems solved by technology

However, the effective test aperture of the laser plane interferometer currently on the market is up to Φ150mm, and the test area is closed, so it is impossible to test the surface shape and parallelism of the large-size window parts in the full range.

Therefore, at present, for large-size optical window parts (equivalent diameter Φ150mm or more), in the optical workshop, the traditional optical flat crystal is mainly used to test its surface shape. The main problems of this measurement method are: it is easy to cause damage to the polished surface of the part. , is greatly affected by the ambient temperature, and the experience of the processor has a great impact on the measurement results, which directly affects the machining accuracy and machining efficiency of large-size window parts

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