Ultrasonic assisted reciprocating swing roll to fixed roll hot-roll embossing device and embossing method

Abstract

The invention discloses an ultrasonic assisted reciprocating swing roll to fixed roll hot-roll embossing device and method. The embossing device comprises a roll outlet mechanism, a first guide roller, a heating roller, a centering mold roller, a swing pressure roller module, a cooling device, a second guide roller, a third guide roller, a winding mechanism, a base belt and a polymer material. Theroll outlet mechanism is connected with the first guide roller; the heating roller is positioned above the first guide roller; the first guide roller is connected with the fixed mold roller; the swing pressure roller module is positioned under the fixed mold roller, and can swing around the fixed mold roller; the cooling device is positioned behind the fixed mold roller; the fixed mold roller isconnected with the second guide roller; the second guide roller is connected with the third guide roller; and the third guide roller is connected with the winding roller. A fixed pressure roller is improved as a swing pressure module, so that the defect of the fixed roller only pressing a fixed position is made up, and the embossing precision and the embossing efficiency are greatly improved.

Description

technical field [0001] The invention relates to the technical field of ultrasonic-assisted roll-to-roll thermal roll embossing, in particular to an ultrasonic-assisted reciprocating swing roll-to-fixed roll thermal roll embossing device and method. Background technique [0002] Nanoimprint technology is a new type of micro-nano processing technology. This technology achieves ultra-high resolution through mechanical transfer. It is expected to replace traditional lithography technology in the future and become an important processing method in the field of microelectronics and materials. The environment required by ordinary thermal embossing is relatively harsh, so ultrasonic-assisted imprinting technology is gradually integrated into nanoimprinting, but traditional flat-panel thermal embossing cannot continuously form molds, resulting in relatively low efficiency. Roll-to-roll hot roll embossing technology combines the production method of roll-to-roll and flat-bed hot embos...

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Problems solved by technology

[0005] The purpose of the present invention is to overcome the technical problems that the polymer texture is easily damaged and there are many unsaturation defects in the prior art, and to provide a polymer material that can fill the micro-textured cavity more completely and is not prone to defects. Ultrasonic-assisted reciprocating swing roll to fixed roll hot roll embossing device and method

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