Vacuum coating equipment and method for rapidly heating conductive magnetic conduction tray

Abstract

The invention discloses vacuum coating equipment and a method for rapidly heating a conductive magnetic conduction tray. The vacuum coating equipment comprises a fast pre-heating loading cavity, a heating buffer chamber for heating the tray, a coating chamber for coating products on the tray, a cooling buffer chamber for slowly cooling the tray, a cooling chamber for cooling the tray and an unloading chamber; the fast pre-heating loading cavity, the heating buffer chamber, the coating chamber, the cooling buffer chamber and the cooling chamber are sequentially arranged from left to right, wherein at least one cavity of the loading cavity, the heating buffer cavity, the coating cavity and the cooling buffer chamber is designed to be connected to an induction coil on a middle and high frequency power supply; and an alternating magnetic field with an instantaneous change of polarity is generated on the periphery of the induction coil, and when the conductive magnetic conduction tray is located in the alternating magnetic field, the eddy current effect and the hysteresis phenomenon are generated to heat the tray, so that the technical effect of quickly heating the tray is realized. Meanwhile, according to the method for rapidly heating the conductive magnetic conduction tray, the high frequency power supply is adopted to be connected with the induction coil, so that the tray is heated through the alternating magnetic field with the instantaneous change of polarity of the induction coil, the heating speed is high, the design of the cavity is simple, and the temperature of the tray is stable.

Description

technical field [0001] The invention relates to the field of vacuum coating, in particular to a vacuum coating device and a method for rapidly heating a conductive and magnetically conductive tray. Background technique [0002] As far as vacuum coating equipment is concerned, it is a key step to uniformly and rapidly heat the tray loaded with samples to reach the temperature required by the process. [0003] In recent years, the heating method adopted by most vacuum coating equipment is the auxiliary heating of the heating block (equipped with heating wire) with hot air flow outside. Although it can reach the temperature required by the process, the heating speed of this method is slow and time-consuming. The sample tray is brought up to process temperature in seconds. [0004] In response to this problem, the infrared rapid heating method has been applied, which can satisfy the temperature of the tray loaded with samples to the temperature required by the process within te...

AI Technical Summary

Problems solved by technology

[0003] In recent years, the heating method adopted by most vacuum coating equipment is the auxiliary heating of the heating block (equipped with heating wire) with hot air flow outside. Although it can reach the temperature required by the process, the heating speed of this method is slow and time-consuming. Brings sample-loaded trays to process temperature in seconds

[0004] In response to this problem, the infrared rapid heating method has been applied, which can satisfy the temperature of the tray loaded with samples to the temperature required by the process within tens of seconds, but the corresponding heating power is slightly higher, continuous or repetitive heating It will cause the temperature in the vacuum chamber to be too high and difficult to stabilize. In addition, the chamber design is complicated; the infrared lamp heating method is usually selected directly above the tray, and it is heated rapidly by vertically downward irradiation. This single-sided irradiation heating The method can only quickly heat the temperature of the upper surface, and the temperature of the lower half of the tray will not change greatly within a few seconds. Since the tray has a certain thickness, only a single heating of the upper surface cannot effectively improve the overall temperature. rise, so there will be an obvious temperature gradient in the tray. During the process, the temperature of the tray will be gradually compounded and lowered continuously, so that the overall temperature of the tray is lower than the temperature required by the process, which will have a negative impact on the production line.

Images