Heating furnace body and semiconductor device

Abstract

The invention provides a heating furnace body and semiconductor device. The heating furnace body comprises an annular heat preservation body; and heating structures which are independent of one another and are sequentially arranged on the inner side of the annular heat preservation body in the axial direction of the annular heat preservation body; moreover, at least one heating structure comprisesa plurality of heating subsections which are in one-to-one correspondence with a plurality of subareas divided in the circumferential direction of the annular heat preservation body, and heat radiated by at least two heating subsections at the same time is different. According to the heating furnace body provided by the invention, the heating efficiency can be improved, the heating time can be shortened and the process uniformity can be improved under the condition of the same or less heating power.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a heating furnace body and semiconductor equipment. Background technique [0002] In the existing plasma enhanced chemical vapor deposition (Plasma Enhanced Chemical VaporDeposition, hereinafter referred to as PECVD) equipment, the reaction chamber usually adopts a tubular furnace body, and the furnace body temperature field is designed to be uniformly heated in the circumferential direction. The specific heating structure is to use resistance wire After being uniformly wound and shaped, wrap insulation cotton on the outside. During the operation of the process, the graphite boat first enters the tubular furnace body in a cold state, and then waits for the overall temperature of the tubular furnace body to return to the process temperature before starting the coating process. [0003] In practical applications, the graphite sheets in the graphite boat are placed verticall...

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Problems solved by technology

[0003] In practical applications, the graphite sheets in the graphite boat are placed vertically (placed along the axial direction of the tubular furnace body), and multiple graphite sheets are distributed at intervals along a diameter direction of the tubular furnace body, which makes the outermost The two graphite sheets closest to the furnace body have the highest heat absorption rate and the fastest temperature rise, while the middle graphite sheet has a low heat absorption rate due to the blockage of the outer graphite sheet. It is necessary to increase the heating power and prolong the heating time to make the middle The graphite flakes meet the temperature requirements, but increasing the heating power will increase the process cost, and prolonging the heating time will lead to a decrease in production capacity

In addition, due to the temperature difference between the graphite sheets, the thickness uniformity of the film layer is poor

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