Piezoelectric MEMS microphone

A microphone and piezoelectric technology, applied in the field of piezoelectric MEMS microphones, can solve problems such as difficult to improve, do not consider ASIC gain, sensitivity limitations, etc., to achieve the effect of increased sensitivity

Active Publication Date: 2019-12-06
AAC ACOUSTIC TECH (SHENZHEN) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In practical applications, for a given diaphragm 21 material and the size of MEMS Die, Figure 1 to Figure 4 The sensitivity of the design show...

Method used

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Examples

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Embodiment Construction

[0032] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0033] It should be noted that all directional indications (such as up, down, inside, outside, top, bottom...) in the embodiments of the present invention are only used to explain the relationship between the components in a certain posture (as shown in the drawings). If the specific posture changes, the directional indication will also change accordingly.

[0034] It should also be noted that when an element is referred to as being “fixed” or “disposed on” another element, the element may be directly on the other element or there may be an intervening element at the same time. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present.

[0035] see Figure 5 to Figure 12 , the embodiment of the present invention provides a piezoelectric MEMS mic...

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Abstract

The invention provides a piezoelectric MEMS (Micro Electro Mechanical System) microphone. The piezoelectric MEMS microphone comprises a substrate with a cavity and a piezoelectric vibrating diaphragmarranged on the substrate, wherein the substrate comprises an annular base and a supporting column arranged on the inner side of the annular base at intervals, the piezoelectric vibrating diaphragm comprises a plurality of diaphragms arranged in the circumferential direction of the supporting column at intervals, each diaphragm comprises a fixed end connected with the supporting column and a freeend suspended above the cavity, and the width of each diaphragm is gradually increased from the fixed end to the free end. According to the piezoelectric MEMS microphone, under the action of sound pressure, the free end vibrates, the short fixed end is driven by the wide free end, and the diaphragm close to the fixed end deforms greatly to generate more charges, so that the sensitivity can be further improved.

Description

【Technical field】 [0001] The invention relates to the technical field of acoustic-electric conversion devices, in particular to a piezoelectric MEMS microphone. 【Background technique】 [0002] MEMS microphone is an electro-acoustic transducer made by micromachining technology, which has the characteristics of small size, good frequency response characteristics, and low noise. With the development of electronic devices towards miniaturization and thinning, MEMS microphones are more and more widely used in these devices. [0003] At present, MEMS microphones are mainly divided into capacitive MEMS microphones and piezoelectric MEMS microphones. Piezoelectric MEMS microphones have many advantages over traditional capacitive MEMS microphones, including dust resistance, water resistance, and higher maximum output sound pressure (AOP). Different from the piezoelectric diaphragm structure of the capacitive microphone, the piezoelectric diaphragm of the piezoelectric MEMS micropho...

Claims

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Application Information

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IPC IPC(8): H04R19/00
CPCH04R19/005H04R2201/003H04R7/06H04R7/18H04R17/02B81B3/0037B81B2201/0257B81B2203/0118B81B2203/0127
Inventor 段炼张睿陈志远
Owner AAC ACOUSTIC TECH (SHENZHEN) CO LTD
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