Large-stroke high-precision micro-nano motion servo feeding system and control method

A motion control and servo feed technology, applied in the micro-nano field, can solve the problems of high cost of intelligent materials, nonlinearity, and complex control, and achieve the effect of improving low-speed feed accuracy and overall dynamic performance indicators.

Active Publication Date: 2019-12-10
SHANDONG UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

[0003] However, the inventors found that the application of smart materials has defects such as high cost, small travel range, low rigidity, nonlinearity, and complicated control, which limit its application range

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  • Large-stroke high-precision micro-nano motion servo feeding system and control method

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Embodiment Construction

[0035] It should be pointed out that the following detailed description is exemplary and is intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0036]It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and / or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and / or combinations thereof;

[0037] For the convenience of description, if the words "up", "down", "left" and "right" appear in the present...

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Abstract

The invention discloses a large-stroke high-precision micro-nano motion control servo feeding system, which comprises a first servo motor, a second servo motor, a hydrostatic pressure lead screw pair,a hydraulic control system, a pressure detection device, a displacement detection device, a position feedback module, a motion controller and a PC. The hydrostatic pressure lead screw pair comprisesa lead screw and a hydrostatic pressure nut assembly which are matched with each other; the first servo motor drives the lead screw to rotate, and the second servo motor drives the hydrostatic pressure nut to rotate. The two servo motors are driven by respective servo driving systems; the hydrostatic pressure nut assembly drives the workbench to achieve linear motion. One end of the displacement detection device is connected with the workbench, while the other end of the displacement detection device is connected with the position feedback module, and measured workbench displacement information is fed back to the position feedback module; the position feedback module feeds back the signal to the motion controller; accurate closed-loop feeding control of the workbench is achieved through the combination of two rotary motions of the hydrostatic pressure lead screw and the nut.

Description

technical field [0001] The invention relates to the field of micro-nano technology, which belongs to the field of ultra-precision CNC machine tools and high-end electromechanical equipment ultra-precision motion control technology, and specifically relates to a high-resolution micro-nano motion servo feed system suitable for large-stroke, high-precision CNC machine tools and its Control Method. Background technique [0002] Precision and ultra-precision machining technology has become the technical support for the development of national defense and high-tech. With the upgrading of products, many high-tech products have higher and higher requirements for the machining accuracy of parts. Therefore, the performance of precision and ultra-precision machine tools Indicator requirements are also gradually increasing. However, one of the key technical bottlenecks of this high-precision motion control is how to accurately, stably and reliably realize the micro-feed control of the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/41
CPCG05B19/41G05B2219/34083
Inventor 冯显英王兆国李沛刚杜付鑫孙德鹏李慧
Owner SHANDONG UNIV
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