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A large-stroke high-precision micro-nano motion servo feed system

A servo-feed, high-precision technology, applied in the micro-nano field, can solve the problems of high cost of smart materials, nonlinearity, and limited application range, and achieve the effect of improving low-speed feed accuracy and overall dynamic performance indicators.

Active Publication Date: 2021-08-31
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, the inventors found that the application of smart materials has defects such as high cost, small travel range, low rigidity, nonlinearity, and complicated control, which limit its application range

Method used

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  • A large-stroke high-precision micro-nano motion servo feed system
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  • A large-stroke high-precision micro-nano motion servo feed system

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Embodiment Construction

[0035] It should be pointed out that the following detailed description is exemplary and is intended to provide further explanation to the present application. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

[0036]It should be noted that the terminology used here is only for describing specific implementations, and is not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly dictates otherwise, the singular is intended to include the plural, and it should also be understood that when the terms "comprising" and / or "comprising" are used in this specification, they mean There are features, steps, operations, means, components and / or combinations thereof;

[0037] For the convenience of description, if the words "up", "down", "left" and "right" appear in the present...

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Abstract

The invention discloses a large-stroke high-precision micro-nano motion control servo feed system, including a first servo motor, a second servo motor, a hydrostatic screw pair, a hydraulic control system, a pressure detection device, a displacement detection device, a position Feedback module, motion controller and PC; the hydrostatic screw pair includes a screw and a hydrostatic nut assembly that cooperate with each other; the first servo motor drives the screw to rotate, and the second servo motor drives the hydrostatic nut to perform Rotary motion; two servo motors are driven by their respective servo drive systems; the hydrostatic nut assembly drives the table to achieve linear motion. One end of the displacement detection device is connected to the worktable, and the other end is connected to the position feedback module, and the measured displacement information of the worktable is fed back to the position feedback module; the position feedback module feeds back the signal to the motion controller; through the liquid static The synthesis of the two rotary motions of the screw and the nut realizes the precise closed-loop feed control of the table.

Description

technical field [0001] The invention relates to the field of micro-nano technology, which belongs to the field of ultra-precision CNC machine tools and high-end electromechanical equipment ultra-precision motion control technology, and specifically relates to a high-resolution micro-nano motion servo feed system suitable for large-stroke, high-precision CNC machine tools and its Control Method. Background technique [0002] Precision and ultra-precision machining technology has become the technical support for the development of national defense and high-tech. With the upgrading of products, many high-tech products have higher and higher requirements for the machining accuracy of parts. Therefore, the performance of precision and ultra-precision machine tools Indicator requirements are also gradually increasing. However, one of the key technical bottlenecks of this high-precision motion control is how to accurately, stably and reliably realize the micro-feed control of the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/41
CPCG05B19/41G05B2219/34083
Inventor 冯显英王兆国李沛刚杜付鑫孙德鹏李慧
Owner SHANDONG UNIV
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