Integrated probe diagnosis system circuit module, diagnosis system and diagnosis method

Abstract

The invention belongs to the field of plasma diagnosis and relates to an integrated probe diagnosis system circuit module, a diagnosis system and a diagnosis method. Plasma diagnosis is the technologyfor measuring plasma parameters by an experimental method and is an important means for researching physical properties of plasmas. Diagnosis methods comprise a probe method, a microwave method, a laser method, a spectrum method, an optical method and a particle beam method, wherein the probe method is the most common method. Plasma parameters such as the electron temperature, the electron concentration, the ion concentration, the saturated ion current density and the space potential of the plasmas can be obtained through a probe method. Common probes comprise a Langmuir probe, a variant of the Langmuir probe, namely a Faraday probe and a transmitting probe. The integrated probe diagnosis system circuit module is advantaged in that probe circuits are integrated together, signals are shielded in a unified manner, so the use process of the probes can be greatly simplified.

Description

technical field [0001] The invention belongs to the field of plasma diagnosis and relates to an integrated circuit module of a probe diagnosis system, a diagnosis system and a diagnosis method. Background technique [0002] Plasma diagnosis is a technique to measure plasma parameters by experiment, and it is an important means to study the physical properties of plasma. Diagnostic methods include probe method, microwave method, laser method, spectroscopic method, optical method and particle beam method, among which probe method is the most commonly used. The probe method is a means of inserting a probe into the plasma to obtain its internal structure and parameter distribution. The plasma parameters such as electron temperature, electron concentration, ion concentration, saturated ion current density, and space potential can be obtained by the probe method. Commonly used probes include Langmuir probes, and their variants - Faraday probes and emission probes. The probe cir...

AI Technical Summary

Problems solved by technology

The probe circuit determines the quality of the data collected by the probe. In actual use, it is often necessary to temporarily build a circuit according to the experimental requirements, which may often lead to inaccurate data, and it takes a lot of time to check the circuit.

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