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Frequency-adjustable sound wave receiving device based on Helmholtz resonant cavity

A sound wave receiving and resonant cavity technology, applied in the field of sensors, can solve the problems of low transmission sound pressure and low sensitivity, and achieve the effect of improving the efficiency of electroacoustic energy conversion

Active Publication Date: 2019-12-13
武汉敏声新技术有限公司
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  • Abstract
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AI Technical Summary

Problems solved by technology

To sum up, the sensitivity of the current ultrasonic transducer is not high, and the transmission sound pressure is small, which limits its application to a large extent.

Method used

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  • Frequency-adjustable sound wave receiving device based on Helmholtz resonant cavity
  • Frequency-adjustable sound wave receiving device based on Helmholtz resonant cavity
  • Frequency-adjustable sound wave receiving device based on Helmholtz resonant cavity

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Embodiment Construction

[0024] For a better understanding of the present invention, the following examples are further descriptions of the present invention, but the content of the present invention is not limited to the following examples.

[0025] The present invention provides a frequency-tunable acoustic wave receiving device based on a Helmholtz resonant cavity, which includes a Helmholtz resonant cavity 2 and a MEMS acoustic sensor 1 . The Helmholtz resonant cavity 2 is arranged on the MEMS acoustic sensor 1 . The Helmholtz resonant cavity 2 includes a hollow silicon structure 20 disposed on the surface of the MEMS acoustic sensor 1, a cavity 21 formed by the hollow silicon structure 20 and the surface of the MEMS acoustic sensor 2, and a cavity 21 formed on the silicon structure 20 and connected to the cavity 21. Connected through hole 22. The through hole 22 communicates the external atmosphere with the cavity 21, so as to facilitate the propagation and resonance of sound waves. In addition...

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Abstract

The invention relates to a frequency-adjustable sound wave receiving device based on a Helmholtz resonant cavity. The device comprises the Helmholtz resonant cavity and an acoustic sensor, wherein theHelmholtz resonant cavity comprises a cavity body and a through hole communicating with the cavity body, the Helmholtz resonant cavity is arranged on the acoustic sensor, and the cavity body is in contact connection with the surface of the acoustic sensor. According to the device, the MEMS acoustic sensor and the Helmholtz resonance cavity are combined, the sensitivity is high, and the electroacoustic energy conversion efficiency of an ultrasonic transducer can be improved.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a frequency-tunable acoustic wave receiving device based on a Helmholtz resonant cavity. Background technique [0002] An ultrasonic transducer is a transducer element that can be used to both transmit and receive ultrasonic waves, and is the core of an acoustic sensor. When working in the transmitting mode, the electric energy is converted into the vibration of the transducer through electrostatic force or inverse piezoelectric effect to radiate sound waves; when working in the receiving mode, the sound pressure acts on the surface of the transducer to vibrate, and the transducer The vibration is then converted into an electrical signal. At present, the most widely used ultrasonic sensors are mainly based on bulk piezoelectric transducers, which mainly use the thickness vibration mode of piezoelectric ceramics to generate ultrasonic waves. Since the resonance frequency of the t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B06B3/00B06B1/06
CPCB06B1/0603B06B1/0618B06B3/00B06B2201/55
Inventor 孙成亮王磊吴志鹏朱伟胡博豪林炳辉周禹
Owner 武汉敏声新技术有限公司
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