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Automatic focusing system and method based on multi-depth plane microscope

An autofocus, depth plane technology, applied in microscopes, optics, instruments, etc., can solve the problems of increasing algorithm time and time-consuming, and achieve the effect of speeding up autofocus time

Pending Publication Date: 2020-01-03
苏州睿仟科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The search scan algorithm reduces the number of z-axis scans, but increases the algorithm time, which will also take a long time

Method used

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  • Automatic focusing system and method based on multi-depth plane microscope
  • Automatic focusing system and method based on multi-depth plane microscope
  • Automatic focusing system and method based on multi-depth plane microscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0060] hardware system such as figure 1 shown. The light source 1 is introduced into the Kohler illumination system 3 through the optical fiber 2, and the illuminated sample 6 is imaged on the main camera 11 through the objective lens 7 and the tube lens 9; Camera 13 on. For example, in this embodiment, the objective lens is Plan NA0.25 10x objective lens and Plan NA0.75 20x objective lens, and the beam splitting systems 10 and 12 are prisms (groups), which can be clamped and installed by machined parts. The splitting ratio of the spectroscopic systems 10 and 12 should be designed so that the brightness of the image formed by each depth plane is uniform, neither overexposed nor too dark; the spectroscopic system 12 needs to be designed so that the image size of each depth plane is basically the same. consistent, and have similar aberrations. In this embodiment, the beam splitting system 12 is a beam splitting prism. Taking this prism group as an example, it can be designed ...

Embodiment 2

[0065] hardware system such as figure 2 shown. The light source 1 is introduced into the Kohler illumination system 3 through the optical fiber 2, and the illuminated sample 6 is imaged on the main camera 11 through the objective lens 7 and the tube lens 9; Camera 13 on. The spectroscopic system 12 is a secondary grating, such as Figure 5 As shown, the secondary grating can be part of a Fresnel grating. The light passing through the secondary grating can exit from different angles through diffraction, such as Image 6 As shown, the 0-order and ±1-order outgoing light are emitted through the secondary grating, and different orders of light will image images with different focal depths on the camera.

[0066] The auxiliary camera 13 can simultaneously image three different focal planes. The motion control system 5 controls the motion platform 4 to move and scan in the x and y directions, and controls the objective lens 7 or the tube lens 9 to perform z-axis focus scanning...

Embodiment 3

[0069] hardware system such as image 3 shown. The light source 1 is introduced into the Kohler illumination system 3 through the optical fiber 2, and the illuminated sample 6 is imaged on the main camera 11 through the objective lens 7 and the tube lens 9; Camera 13 on. The light splitting system 12 is two mutually orthogonal secondary gratings, such as Figure 7 shown. The auxiliary camera 13 can simultaneously image 9 different focusing planes. The motion control system 5 controls the motion platform 4 to move and scan in the x and y directions, and controls the objective lens 7 or the tube lens 9 to perform z-axis focus scanning.

[0070] The autofocus scanning process and algorithm are the same as those in Embodiment 1.

[0071] In order to ensure the consistency and continuity of the focus during microscope scanning, curve fitting or artificial intelligence learning can be performed on the focus z value of the scanned position to predict the focus z value of the nex...

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Abstract

The invention discloses an automatic focusing system and method based on a multi-depth plane microscope, and the system comprises the following parts of a lighting system for lighting samples; a moving platform for carrying the samples and moving under the control of the motion control system; a motion control system for controlling the moving platform for moving scanning in x and y directions, and controlling the microscope objective or cylinder for z-axis focusing scanning; and image acquisition equipment including primary and secondary cameras and used for imaging the lighted sampled on theprimary camera respectively through the objective or cylinder and imaging on the secondary camera respectively through the objective, cylinder and a beam splitting system, wherein the secondary camera can image a number of different depth planes at the same time. The calculation of the best focus position through the focusing definition of multiple depth plane images, with no need of a global focus scanning and no need of search scanning, greatly speeds up the automatic focusing time, and at the same time, also has the very high focusing accuracy. The definition of the collected images is better than that of similar products.

Description

technical field [0001] The invention belongs to the technical field of automatic focusing of microscopes, and relates to an automatic focusing system and method based on a multi-depth plane microscope. Background technique [0002] Automatic focus, that is, no human operation is required, the optical imaging system is automatically processed, and through the effective combination of the machine and the program, it can automatically adjust each parameter, such as object distance, image distance, and can clearly calculate the clarity of the imaged picture and The specific location of the imaging ensures the best quality and highest resolution of the final imaged photo. In other words, focus on the object to be inspected, so that the object to be inspected is photographed on the plane of the photosensitive chip to form a clear image, and the main image on the screen is clear. [0003] The surface of the ordinary object to be inspected is a complex curved surface. When scanning...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B21/00G02B21/26G02B21/36
CPCG02B21/002G02B21/26G02B21/361G02B21/365
Inventor 伍祥辰杨翼周健肖长力
Owner 苏州睿仟科技有限公司